한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제22권10호
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  • Pages.884-889
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  • 2009
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  • 1226-7945(pISSN)
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  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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수열합성법에 의한 3차원 ZnO 나노구조체 합성

Synthesis of 3D Nanostructured Flower-like ZnO Architecture on ZnO Thin-film by Hydrothermal Process

  • 유범근 (한국과학기술연구원 박막연구센터) ;
  • 박용욱 (남서울대학교 전자공학과) ;
  • 강종윤 (한국과학기술연구원 박막연구센터) ;
  • 김진상 (한국과학기술연구원 박막연구센터) ;
  • 윤석진 (한국과학기술연구원 박막연구센터)
  • 투고 : 2009.07.16
  • 심사 : 2009.09.21
  • 발행 : 2009.10.01
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초록

Recently, the control of size, morphology and dimensionality in inorganic materials has been rapidly developed into a promising field in materials chemistry. 3D nanostructured flower-like ZnO architecture with different size and shapes have been simply synthesized by hydrothermal process, using zinc acetate and ammonium hydroxide as reactants. In this study, the ZnO thin-films were deposited by RF magnetron sputtering in other to get high adhesion and uniformity of 3D nanostructured flower-like ZnO architecture on a $SiO_2$ substrate. The XRD patterns identified that the obtained the nanocrystallized ZnO architecture exhibited a wurtzite structure. SEM images illustrated that the flower-like ZnO bundles consisted of flower-like or chestnut bur, which were characterized by polycrystalline and (002) preferential orientation.

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