한국결정성장학회지 (Journal of the Korean Crystal Growth and Crystal Technology)

  • 제19권2호
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  • Pages.75-78
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  • 2009
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  • 1225-1429(pISSN)
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  • 2234-5078(eISSN)
한국결정성장학회 (The Korea Association of Crystal Growth)
권호 표지

수직경사응고(VGF)법에 의한 Si 도핑 GaAs 단결정 성장시 $B_{2}O_{3}$ 첨가에 따른 캐리어 농도 변화

Control of carrier concentrations by addition of $B_{2}O_{3}$ in Si-doped vertical gradient freeze (VGF) GaAs single crystal growth

  • 발행 : 2009.04.30
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⟨ 이전 논문 다음 논문 ⟩

초록

PBN 도가니를 이용하여 Si이 도핑된 GaAs 단결정을 수직경사 응고법으로 성장시켰다. PBN 도가니에 산화막인 $B_{2}O_{3}$의 양을 $0{\sim}0.2wt%$ 범위에서 변화시키면서, 성장 후 캐리어 농도를 측정하였다. $B_{2}O_{3}$ 첨가량이 증가함에 따라, 초기 0.1 정도의 Si 도판트의 편석계수는 0.01 부근까지 급격히 감소하고, 동시에 캐리어 농도도 감소하는 것을 알 수 있었다. 이는 성장도중 도판트인 Si이 $B_{2}O_{3}$과 반응하며 도너인 Si 양을 감소시키며, 동시에 억셉터인 B 양을 증가시키기 때문으로 보인다. 한편 PBN 도가니 내면에 얇은 유리질의 $B_{2}O_{3}$층 형성이 용이한 고온 산화막 처리가 결함감소에 효과적임을 확인하였다.

Si-doped GaAs single crystals were grown by vertical gradient freeze using PBN crucibles. The amount of oxide layer $B_{2}O_{3}$ in PBN crucible was changed($0{\sim}0.2wt%$) and measured the concentration of carriers. The segregation coefficients of Si in GaAs melt decreased rapidly from initial 0.1 to 0.01 as the amount of $B_{2}O_{3}$ increases. At the same time, concentration of carriers was shown to decrease. It is likely that the reaction between dopant Si and $B_{2}O_{3}$ in GaAs melt results in the reduction of Si dopants(donor) while increase in the amount of boron(acceptor). The thin layer of $B_{2}O_{3}$ glass in PBN crucible was proved to be a better way to reduce defect formation rather than the total amount of $B_{2}O_{3}$.

키워드

참고문헌

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