참고문헌
- Kussul, E., Baidyk, T., Ruiz-Huerta, L., Caballero-Ruiz, A., Velasco1, G., and Kasatkina, L., 2002, "Development of Micromachine Tool Prototypes for Microfactories," Journal of Micromechnics and Microengineering, Vol. 12, pp. 795-812. https://doi.org/10.1088/0960-1317/12/6/311
- Jeong, S. J., Kim, G. H., Cha, K. R., Lee, K. H., and Song, S., 2006, "A Study on the Motion Mechanism of Multi-Axis Ultra Precision Stage for Optical Element Alignment," Transactions of KSMTE, Vol. 15, pp. 8-16.
- Cady, W. G., 1964, Piezoelectricity, McGraw-Hill, New York
- Haertling, G., 1999, "Ferroelectric ceramics: History and technology," Journal of the American Ceramic Society, Vol. 82, pp. 797-818. https://doi.org/10.1111/j.1151-2916.1999.tb01840.x
- Lim, J. H., Shon, J. H., Kim, J. J., Park, B. O.. and Cho, S. H., 1995, "Variations of Piezoelectric Properties and Compressive Strength of PZT Ceramics with Poling Directions," Journal of the Korean Ceramic Society, Vol. 32, pp. 1131-1138.
- Liu, Y. T., Fung, R. F.. and Huang, T. K., 2004, "Dynamic Responses of a Precision Positioning Table Impacted by a Soft-mounted Piezoelectric Actuator," Precision Engineering, Vol. 28, pp. 252-260. https://doi.org/10.1016/j.precisioneng.2003.10.005
- Adriaens, H. J. M. T. A., Koning, W. L., and Banning, R., 2000, "Modeling Piezoelectric Actuators," IEEE/ASME Transactions on Mechatronics, Vol. 5, pp. 331-341. https://doi.org/10.1109/3516.891044
- Park, J., Keller, S., Carman, G. P., and Hahn, H. T., 2001, "Development of a Compact Displacement Accumulation Actuator Device for both Large Force and Large Displacement," Sensors and Actuators, A 90, pp. 191-202.
- Vorndran, S., 2001, MicroPosioning Nanopositioning NanoAutomation, Physik Instrumente (PI) GmbH, Germany.