한국레이저가공학회지 (Laser Solutions)
- 제12권4호
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- Pages.17-25
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- 2009
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- 1229-0963(pISSN)
액체의 레이저 유기 절연파괴를 이용한 신개념 표면 세정 공정
A novel surface cleaning process using laser-induced breakdown of liquid
- Jang, Deok-Suk (Department of Mechanical Engineering, POSTECH) ;
- Lee, Jong-Myoung (Laser Group, IMT. Co. Ltd.) ;
- Kim, Dong-Sik (Department of Mechanical Engineering, POSTECH)
- 발행 : 2009.12.31
초록
The surface cleaning method based on the laser-induced breakdown (LIB) of gas and subsequent plasma and shock wave generation can remove small particles from solid surfaces. In the laser shock cleaning (LSC) process, a high-power laser pulse induces optical breakdown of the ambient gas above the solid surface covered with contaminant particles. The subsequently created shock wave followed by a high-speed flow stream detaches the particles. In this work, a novel surface cleaning process using laser-induced breakdown of liquid is introduced and demonstrated. LIB of a micro liquid jet increases the shock wave intensity and thus removes smaller particle than the conventional LSC method. Experiments demonstrate that the cleaning force and cleaning efficiency are also increased significantly by this method.