Journal of Magnetics

  • 제14권1호
  • /
  • Pages.42-46
  • /
  • 2009
  • /
  • 1226-1750(pISSN)
  • /
  • 2233-6656(eISSN)
한국자기학회 (The Korean Magnetics Society)
권호 표지
DOI QR코드

DOI QR Code

Angle Sensors Based on Oblique Giant Magneto Impedance Devices

  • Kim, Do-Hun (Functional Materials Research Center, Korea Institute of Science and Technology) ;
  • Na, Ji-Won (Functional Materials Research Center, Korea Institute of Science and Technology) ;
  • Jeung, Won-Young (Functional Materials Research Center, Korea Institute of Science and Technology)
  • 발행 : 2009.03.31
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

The measurement of external magnetic field orientation using Giant Magneto Impedance (GMI) sensors has been performed. A soft magnetic alloy of $Co_{30}Fe_{34}Ni_{36}$ was electroplated on a Si wafer with a CoFeNi seed layer. V-shaped microwire patterns were formed using a conventional photolithography process. An external magnetic field was generated by a rectangular AlNiCo permanent magnet. The reference direction was defined as the external magnetic field direction oriented in the middle of 2 GMI devices. As the orientation of the magnetic field deviated from the reference direction, variation in the field component along each device introduced voltage changes. It was found that, by taking the voltage difference between the left and right arms of the Vshaped device, the nonlinearity of each device could be significantly reduced. The fabricated angle sensor had a linear range of approximately $70^{\circ}$ and an overall sensitivity of approximately 10 mV.

키워드

참고문헌

  1. L. V. Panina and K. Mohri, Appl. Phys. Lett. 65, 1189 (1994). https://doi.org/10.1063/1.112104
  2. M. Knobel, M. L. Sanchez, C. Gomez-Polo, P. Marin, M. Vazquez, and A. Hernando, J. Appl. Phys. 79, 1646 (1996). https://doi.org/10.1063/1.361009
  3. H. Chiriac, T. A. Ovari, and C. S. Marinescu, J. Appl.Phys. 83, 6584 (1998). https://doi.org/10.1063/1.367926
  4. Chen, C. et al., J. Phys. D 9, 1951 (1997).
  5. D. de Cos et al., 41, 3697 (2005).
  6. P. Ripka and L. Kraus, MA: Artech House, 350 (2001)
  7. K. Mohri, T. Uchiyamaa, L. P. Shena, C. M. Caia, and L. V. Panina, J. Magn. Magn. Matt. 249, 351 (2002). https://doi.org/10.1016/S0304-8853(02)00558-9
  8. W. Y. Jeung, H. K. Kim, and J. O. Lee, J. of Kor. Mag. Soc. 15(4), 241 (2005) https://doi.org/10.4283/JKMS.2005.15.4.241
  9. W. Y. Jeung, H. K. Kim, and C. B. Park, J. of Kor. Mag. Soc. 16(5), 249 (2006). https://doi.org/10.4283/JKMS.2006.16.5.249
  10. H. K Kim, D. W. Chun, J. H. Han, K. B. Kim, and W. Y Jeung. Phys. Stat. Sol. (a) 204, 4104 (2007). https://doi.org/10.1002/pssa.200777201
  11. Agilent Application Note “Ultralow Impedance Measurement using 2-port Measurement” (2007).
  12. L. Jin, S. S. Yoon et al., J. Magnetics 12, 31 (2007) https://doi.org/10.4283/JMAG.2007.12.1.031
  13. Kollu, Pratap, Doung-Young Kim, and Cheol-Gi Kim, J. Magnetics 12, 35 (2007). https://doi.org/10.4283/JMAG.2007.12.1.035