센서학회지 (Journal of Sensor Science and Technology)

  • 제18권6호
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  • Pages.461-466
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  • 2009
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  • 1225-5475(pISSN)
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  • 2093-7563(eISSN)
한국센서학회 (The Korean Sensors Society)
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굴곡 진동모드를 이용한 초음파 선형 압전 액추에이터 개발

Development of ultrasonic linear piezoelectric actuator with flexuralvibration mode

  • 발행 : 2009.11.30
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초록

This paper represents a piezoelectric ultrasonic linear actuator with flexural vibration mode. The actuator is composed of two piezo ceramics, the elastic body, and the connecting tip. It is driven by the frictional force between the connecting tip and the linear motion guide. Unimorph actuators have flexural vibration. Its middle point is fixed so that suitable to the flexural vibration of $3/2\lambda$. These vibrations contribute to elliptical motion by mixed mode between longitudinal and transverse mode. It was generated when the ultrasonic electrical signals with 90 degree phase difference are applied to two ceramics. A linear movement can be easily obtained using the elliptical motion. The ATILA, FEM simulator has been used to design actuator and verify the kinetic and dynamic analysis. We used the ceramics of $20\times10\times1$ mm size and confirmed the flexural vibration of the $3/2\lambda$ at the 79 kHz through the scanning of 3D-vibrometer. The maximum velocity of actuator was 221 mm/sec and the thrust force of actuator was 2.7 N in 200Vp-p of additional voltage.

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참고문헌

  1. K. Uchino, S. Nomura, L. E. Cross, and R. E. Newnham, 'New Electrostrictive Materials II', Elect. CeramicsII, vol. 3, pp. 67-71, 1980
  2. K. Uchino and S. Nomura, 'New electrostrictive materials', Jpn. J. Appl. Phys., vol. 20, Suppl. 225, 1981
  3. T. Sashida and T. kenjo, 'An Introduction to ultrasonic motors', Oxford, U.K. : Clarendon, pp. 6-8, 1993
  4. S. Ueha and Y. Tomikawa, Ultrasonic Motors : Theory and Applications. Oxford, U.K. : Clarendon, pp. 4-6, 1993
  5. K. Uchino, 'Piezoelectric motors for camera modules', proceedings, Actuator 2008, pp. 157-160
  6. K. Uchino, 'Piezoeelectric actuators 2008 - Key Factorsfor commercialization', proceedings, Actuator 2008,pp. 107-112 ezoelectric materials and application in actuators
  7. M. Klubal, J.Twiefel, M. Leibenger, and T. Hemsel, 'A novel motor concept based on piezoelectric bending actuators', 2008 5th international workshop on piezoelectric materials and application in actuators
  8. 김정순, 김무준, 하강렬, '압전 횡효과를 이용한 무 지향성 주파수가변 초음파트랜스듀서', 센서학회지, 제13권, 제6호, pp. 417-423, 2004 https://doi.org/10.5369/JSST.2004.13.6.417
  9. 정우석, 강종윤, 김정도, 백동수, 조봉희, 김영호, 윤 석진 '전방향성 선형 압전 액추에이터의 설계와 분석', 센서학회지, 제18권, 제3호, pp. 185-189. 2009 https://doi.org/10.5369/JSST.2009.18.3.185
  10. 오정석, 이창우, 이형석, 김승우, '초정밀 위치결정 을 위한 이중 서보 제어용 미세 구동 메커니즘,' 한국 정밀공학회, 추계학술대회 논문집, pp.249-254, 1994
  11. 이동성, 박종호, 박희재, '이중서보제어루프를 통한 서 모모터 압전구동기의 초정밀위치결정 시스템개발', 한국 정밀공학회, 추계학술대회 논문집, pp. 437- 441, 1997
  12. 김종윤, 엄태봉, 'Micro stage와 global stage를 결합 한 초정밀 2축 이동 장치 개발', 한국 정밀공학회 추계 학술대회 논문집, pp. 300-304, 2001
  13. Q. Wang, Q. Zhang, B. Xu, R. Liu, and L. Cross, 'Non-linear piezoelectric behavior of ceramic bending mode actuators under strong electric fields', Journal of Applied Physics, vol. 86, pp. 3352-3360, 15 Sept. 1999 https://doi.org/10.1063/1.371213
  14. Q. Wang, X. Du, B. Xu, and L. Cross, 'Electromechanical coupling and output e_ciency of piezoelectric bending actuators', IEEE Trans. on Ultrasonics, Ferro. And Freq. Control, vol. 46, pp. 638-646, May 1999 https://doi.org/10.1109/58.764850
  15. E. heinonen, J. Juuti, and S. Leppavuori, 'Characterization and modelling of 3D piezoelectric ceramic structures with ATILA software', Journal of the European Ceramic Society, vol. 25, no. 12, pp. 2467-2470, 2005 https://doi.org/10.1016/j.jeurceramsoc.2005.03.083
  16. 고현필, 강종윤, 윤석진, 'ATILA를 이용한 소형 선 형 압전 모터의 설계', 전기전자재료학회, vol. 18, no. 12, pp. 18-26, 2005