참고문헌
- H. Nanto and S. Takada, 'Highly conductive and transparent aluminium doped zinc oxide thin films prepared by RF magnetron sputtering', Jpn. J. Appl. Phy., Vol. 23, No. 5, p. L280, 1984 https://doi.org/10.1143/JJAP.23.L280
- T. Minami, H. Sato, H. Nanto, and S. Takada, 'Highly conductive and transparent silicon doped zinc oxide thin films prepared by RF magnetron sputtering', Jpn. J. Appl. Phys., Vol. 25, No. 9, p. L777, 1986
- W. W. Wenas etc., 'Electrical and optical properties of boron-doped ZnO thin films for solar cell grown by metalorganic chemical vapor deposition', J. Appl. Phys., Vol. 70, p. 7119, 1991 https://doi.org/10.1063/1.349794
- 나영일, 이재형, 임동건, 양계준, '태양전지 응용을 위한 PC 기판상의 ZnO:Al 박막 특성에 관한 연구', 전기전자재료학회논문지, 18권, 2호, p. 116, 2005 https://doi.org/10.4313/JKEM.2005.18.2.116
- X. Hao, J. Ma, D. Zhang, T. Yang, H. Ma, Y. Yang, C. Cheng, and J. Huang. 'Thickness dependence of structural, optical and electrical properties of ZnO:Al films prepared on flexible substrates', Appl. Surf. Sci., Vol. 183, p. 137, 2001 https://doi.org/10.1016/S0169-4332(01)00582-7
- J. H. Lee, D. J. Lee, D. G. Lim, and K. J. Yang, 'Structural, electrical and optical properties of ZnO:Al films deposited on flexible organic substrates for solar cell applications', Thin Solid Films, Vol. 515, p. 6094, 2007 https://doi.org/10.1016/j.tsf.2006.12.099
- S. Hashimoto, K. Hirokawa, Y. Fukuda, K. Suzuki, T. Suzuki, N. Usuki, N. Gennai, S. Yoshida, M. Koda, H. Sezaki, H. Horie, A. Tanaka, and T. Ohtsubo, 'Correction of peak shift and classification of change of x-ray photoelectron spectra of oxides as a result of ion sputtering', Surf. & Interface Anal., Vol. 18, p. 799, 1992 https://doi.org/10.1002/sia.740181204
- H. L. Hartnagel, A. L. Dawar, A. K. Jain, and C. Jagadish, 'Semiconducting Transparent Thin Films', IOP Publishing Ltd., p. 138, 1995
- G. Frank, E. Kauer, and H. Kostlin, 'Transparent heat-reflecting coatings based on highly doped semiconductors', Thin Solid Films, Vol. 77, p. 107, 1981 https://doi.org/10.1016/0040-6090(81)90365-5