한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제22권3호
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  • Pages.277-283
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  • 2009
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  • 1226-7945(pISSN)
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  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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플라스틱 기판에 증착한 ZnO:Al 박막의 특성에 미치는 스퍼터 압력 효과

Effects of Sputter Pressure on the Properties of Sputtered ZnO:Al Films Deposited on Plastic Substrate

  • 이재형 (군산대학교 전자정보공학부)
  • 발행 : 2009.03.01
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초록

In this paper, aluminum doped zinc oxide (ZnO:Al) thin films on plastic substrate such as poly carbonate (PC), polyethylene terephthalate (PET) were prepared by RF magnetron sputtering method for flexible solar cell applications. Effects of the sputter pressure on the structural, electrical and optical properties were investigated. The crystallinity and the degree of the (002) orientation were deteriorated with increasing the sputter pressure. When the sputter pressure was higher, the conductivity of ZnO:Al films was improved because of the high carrier concentration and the Hall mobility. High quality ZnO:Al films with resistivity as low as $1.9{\times}10^{-3}{\Omega}-cm$ and the optical transmittance over 80 % in the visible region have been obtained on PC substrate at 2 mTorr.

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참고문헌

  1. H. Nanto and S. Takada, 'Highly conductive and transparent aluminium doped zinc oxide thin films prepared by RF magnetron sputtering', Jpn. J. Appl. Phy., Vol. 23, No. 5, p. L280, 1984 https://doi.org/10.1143/JJAP.23.L280
  2. T. Minami, H. Sato, H. Nanto, and S. Takada, 'Highly conductive and transparent silicon doped zinc oxide thin films prepared by RF magnetron sputtering', Jpn. J. Appl. Phys., Vol. 25, No. 9, p. L777, 1986
  3. W. W. Wenas etc., 'Electrical and optical properties of boron-doped ZnO thin films for solar cell grown by metalorganic chemical vapor deposition', J. Appl. Phys., Vol. 70, p. 7119, 1991 https://doi.org/10.1063/1.349794
  4. 나영일, 이재형, 임동건, 양계준, '태양전지 응용을 위한 PC 기판상의 ZnO:Al 박막 특성에 관한 연구', 전기전자재료학회논문지, 18권, 2호, p. 116, 2005 https://doi.org/10.4313/JKEM.2005.18.2.116
  5. X. Hao, J. Ma, D. Zhang, T. Yang, H. Ma, Y. Yang, C. Cheng, and J. Huang. 'Thickness dependence of structural, optical and electrical properties of ZnO:Al films prepared on flexible substrates', Appl. Surf. Sci., Vol. 183, p. 137, 2001 https://doi.org/10.1016/S0169-4332(01)00582-7
  6. J. H. Lee, D. J. Lee, D. G. Lim, and K. J. Yang, 'Structural, electrical and optical properties of ZnO:Al films deposited on flexible organic substrates for solar cell applications', Thin Solid Films, Vol. 515, p. 6094, 2007 https://doi.org/10.1016/j.tsf.2006.12.099
  7. S. Hashimoto, K. Hirokawa, Y. Fukuda, K. Suzuki, T. Suzuki, N. Usuki, N. Gennai, S. Yoshida, M. Koda, H. Sezaki, H. Horie, A. Tanaka, and T. Ohtsubo, 'Correction of peak shift and classification of change of x-ray photoelectron spectra of oxides as a result of ion sputtering', Surf. & Interface Anal., Vol. 18, p. 799, 1992 https://doi.org/10.1002/sia.740181204
  8. H. L. Hartnagel, A. L. Dawar, A. K. Jain, and C. Jagadish, 'Semiconducting Transparent Thin Films', IOP Publishing Ltd., p. 138, 1995
  9. G. Frank, E. Kauer, and H. Kostlin, 'Transparent heat-reflecting coatings based on highly doped semiconductors', Thin Solid Films, Vol. 77, p. 107, 1981 https://doi.org/10.1016/0040-6090(81)90365-5