Applied Chemistry for Engineering (공업화학)

The Korean Society of Industrial and Engineering Chemistry (한국공업화학회)
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Surface Modification of TiO2 Thin Films by N2 Atmospheric Plasma and Evaluation of Photocatalytic Activity

질소 상압플라즈마를 이용한 TiO2 박막의 표면개질 및 광활성 평가

  • Lim, Gyeong-Taek (Research Institute for Catalysis and Center for Photonic Materials and Devices, Chonnam National University) ;
  • Kim, Kyung Hwan (Department of Advanced Chemicals and Center for Functional Nano Fine Chemicals, Chonnam National University) ;
  • Park, Jun (Department of Advanced Chemicals and Center for Functional Nano Fine Chemicals, Chonnam National University) ;
  • Kim, Kyoung Seok (Department of Advanced Chemicals and Center for Functional Nano Fine Chemicals, Chonnam National University) ;
  • Park, Yu Jeoung (Department of Advanced Chemicals and Center for Functional Nano Fine Chemicals, Chonnam National University) ;
  • Song, Sun-Jung (Department of Advanced Chemicals and Center for Functional Nano Fine Chemicals, Chonnam National University) ;
  • Kim, Jong-Ho (Research Institute for Catalysis and Center for Photonic Materials and Devices, Chonnam National University, Department of Advanced Chemicals and Center for Functional Nano Fine Chemicals, Chonnam National University) ;
  • Cho, Dong Lyun (Research Institute for Catalysis and Center for Photonic Materials and Devices, Chonnam National University, Department of Advanced Chemicals and Center for Functional Nano Fine Chemicals, Chonnam National University)
  • 임경택 (전남대학교 촉매연구소, 전남대학교 광소재부품연구센터) ;
  • 김경환 (전남대학교 신화학소재공학과, BK21 기능성 나노 신화학소재 사업단) ;
  • 박준 (전남대학교 신화학소재공학과, BK21 기능성 나노 신화학소재 사업단) ;
  • 김경석 (전남대학교 신화학소재공학과, BK21 기능성 나노 신화학소재 사업단) ;
  • 박유정 (전남대학교 신화학소재공학과, BK21 기능성 나노 신화학소재 사업단) ;
  • 송선정 (전남대학교 신화학소재공학과, BK21 기능성 나노 신화학소재 사업단) ;
  • 김종호 (전남대학교 촉매연구소, 전남대학교 광소재부품연구센터,전남대학교 신화학소재공학과, BK21 기능성 나노 신화학소재 사업단) ;
  • 조동련 (전남대학교 촉매연구소, 전남대학교 광소재부품연구센터,전남대학교 신화학소재공학과, BK21 기능성 나노 신화학소재 사업단)
  • Received : 2009.04.01
  • Accepted : 2009.05.04
  • Published : 2009.08.10
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Abstract

$TiO_2$ thin films were surface-modified with atmospheric plasma and their photocatalytic activities were evaluated. The films were deposited on glass plates by dip-coating in a $TiO_2$ sol-gel solution and sintered at various temperatures for various times. Nitrogen plasma was used for the modification and the experiments were carried out varying operational parameters such as discharge power and treatment time. Photocatalytic activity was evaluated based on the degradation efficiency of methylene blue (MB) under irradiation of UV-A and fluorescent light. According to XPS analysis, a little amount of nitrogen was found to be doped in the film surface after the modification. As a result, photocatalytic activity increased under irradiation of UV-A and fluorescent light, especially fluorescent light.

상압플라즈마 공정을 이용하여 $TiO_2$ 박막의 표면을 개질하고 광촉매 활성을 평가하였다. $TiO_2$ 박막은 $TiO_2$ 졸-겔 용액에서 유리판에 dip-coating법으로 코팅한 후 소성 온도와 소성 시간을 변화시켜 가면서 제조하였다. 표면 개질에 사용된 플라즈마는 질소 플라즈마였으며, 방전전력, 처리시간 등의 공정변수를 변화시키면서 실험을 수행하였다. 광촉매 활성은 UV-A와 형광등 하에서의 메틸렌 블루 분해효율을 바탕으로 평가하였다. XPS 분석 결과, 박막의 표면에 소량의 질소가 도핑되었음을 알 수 있었으며, 광촉매 효율은 UV-A와 형광등 하에서 모두 증가하였고, 특히 형광등 하에서 좀 더 증가하였다.

Keywords

Acknowledgement

Supported by : 한국학술진흥재단, 전남대학교

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