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플라스틱 기판의 Outgassing이 TCO 박막의 전기적 특성에 미치는 영향

Out Gassing from Plastic Substrates Affect on the Electrical Properties of TCO Films

  • 김화민 (대구가톨릭대학교 전자공학과) ;
  • 지승훈 (대구가톨릭대학교 전자공학과)
  • 발행 : 2009.11.01

초록

In this work, transparent conductive oxide(TCO) films such as $In_2O_3-SnO_2$(ITO) and $In_2O_3-ZnO$(IZO) were prepared on polyethylene naphthalene(PEN) and glass substrates by using rf-magnetron sputtering system. The TCO films deposited on PEN substrate show very poor conductivity as compared to that of the TCO films deposited on glass substrates. From the results of the residual gas analysis(RGA) test, this poor stability of plastic substrate is presumed to be caused by the deteriorated adhesion between the TCO films and the plastic substrate due to outgassing from the plastic substrate during deposition of TCO films. From our experiment, it is found that the vaporization of some defects in the plastic substrates deteriorate the adhesion of the TCO films to the plastic substrate, because the most plastic substrates containing the water vapor and/or other adsorbed particles such as organic solvents. Mixing of these gases vaporized in the sputtering process will also affect the electrical property of the deposited TCO films. Inorganic thin composite $(SiO_2)_{40}(ZnO)_{60}$ film as a gas barrier layer is coated on the PEN substrate to protecting the diffusion of vapors from the substrate, so that the TCO films with an improved quality can be obtained.

키워드

참고문헌

  1. J. Li, L. Hu, J. Liu, L. Wang, T. J. Marks, and G. Gruner, 'Indium tin oxide modified transparent nanotube thin films as effective anodes for flexible organic light-emitting diodes', Appl. Phys. Lett., Vol. 93, No. 8, p. 083306, 2008 https://doi.org/10.1063/1.2970049
  2. B. D. Vogt, H. J. Lee, V. M. Prabhu, D. M. DeLongchamp, S. K. Satija, E. K. Lin, and W. l. Wu, 'X-ray and neutron reflectivity measurements of moisture transport through model multilayered barrier films for oled applications', J. Appl. Phys., Vol. 97, No. 11, p. 114509, 2005 https://doi.org/10.1063/1.1923590
  3. 이진호, 추혜용, 서경수, 강광용, '플렉시블 디스플레이', 전자통신동향분석, 20권, p. 48, 2005
  4. 배강, 왕태현, 손선영, 김화민, 홍재석, '대향타겟식 스퍼터링 장치의 공정 조건에 따른 $SiO_{\chi}$ 가스 차단막의 특성', 전기전자재료학회논문지, 22권, 7호, p. 595, 2009 https://doi.org/10.4313/JKEM.2009.22.7.595
  5. S. H. Kwon, S. Y. Paik, and J. S. Yoo, 'Electroluminescent properties of MEH–PPV light-emitting diodes fabricated on the flexible substrate', Synth., Met., Vol. 130, No. 1, p. 55, 2002 https://doi.org/10.1016/S0379-6779(02)00105-4
  6. H. M. Kim, S. K. Jung, J. S. Ahn, Y. J. Kang, and K. C. Je, 'Electrical and optical properties of $In2_O_3$-ZnO films deposited on polyethylene terephthalate substrates by radio frequency magnetron sputtering', Jpn. J. Appl. Phys., Vol. 42, No. 1, p. 223, 2003 https://doi.org/10.1143/JJAP.42.223
  7. J. M. Park, J. J. Kim, H. M. Kim, J. H. Kim, S. W. Ryu, S. H. Park, and J. S. Ahn, 'Substrate effects on the characteristics of $(In_2O_3)_1-_{\chi}(ZnO)_{\chi}$ films', J. Korean Phys. Soc., Vol. 48, No. 6, p. 1624, 2006
  8. H. M. Kim and O. J. Kwon, 'Enhanced properties of transparent conductive oxide films prepared on PEN substrates with a $(SiO_2)_{40}(ZnO)_{60}$ gas barrier layer', J. Korean Phys. Soc., Vol. 55, No. 1, p. 197, 2009 https://doi.org/10.3938/jkps.55.197
  9. 권오정, 김동영, 류성원, 김화민, 손선영, 'PEN 기판위에 무기물 가스 베리어 층을 갖는 ITO 박막의 전기적 및 광학적 특성', 새물리, 58권, 2호, p. 243, 2009
  10. 김광호, 이주원, 김영철, 주병권, 김재경, '유기 EL 보호층으로 적용하기 위한 무기 복합 박막의 투습율 특성 연구', 전기전자재료학회논문지, 17권, 4호, p. 432, 2007 https://doi.org/10.4313/JKEM.2004.17.4.432
  11. S. Sohn, K. Kim, S. Kho, D. Jung, and J. H. Boo, 'Effects of plasma polymerized paraxylene intermediate layers on characteristics of flexible organic light emitting diodes fabricated on polyethylene terephthalate substrates', J. Alloys. Comp., Vol. 449, No. 1-2, p. 191, 2008 https://doi.org/10.1016/j.jallcom.2006.01.143