References
- S. Y. Yoo, H. S. Choi, J. I. Ryu, W. B. Lee, and J. Y. Lee, 'Manufacturing process of 4 mask a-Si TFT panel by one step dry etching on Mo/Al/Mo data line', International Display Workshop '05, p. 1121, 2005
- S. Kido, M. Yamasshita, K. Akagami, and Y. Mutayama, 'Process evolution by photo- lithographic process techniques and improvement of conventiuonal 4-mask process technologies', International Display Workshop '05, p. 2008, 2005
- C.-Y. Liang, F.-Y. Gan, P.-T. Liu, F. S. Yeh, S. H.-L.Chen, and T.-C. Chang, 'A novel self-aligned etch-stopper structure with lower photo leakage for AMLCD and sensot applications', IEEE EDL., Vol. 27, No. 12, p. 978, 2006 https://doi.org/10.1109/LED.2006.886418
- Y. J. Choi, B. C. Lim, I. K. Woo, J. I. Ryu, and J. Jang, 'Low photo-leakage current amorphous silicon thin film transistor with a thin active layer', J. Non-Cryst. Solids, Vol. 266-269, p. 1299, 2000 https://doi.org/10.1016/S0022-3093(99)00941-2
- J. H. Choi, C. S. Kim, B. C. Lim, and J. Jang, 'A novel thin film transistor using double amorphous silicon active layer', IEEE ED, Vol. 45, No. 9, p. 2074, 1998 https://doi.org/10.1109/16.711377
- 임승혁, 권상직, 조의식, '비정질 실리콘 TFT의 광누설 전류에 Backlight 광원의 광학적 특성이 미치는 영향에 대한 연구', 전기전자재료학회논문지, 21권, 9호, p. 844, 2008 https://doi.org/10.4313/JKEM.2008.21.9.844
- S. H. Im, S. J. Kwon, and E. S. Cho, 'Photoelectric effects on the photocurrent of an a-Si:H thin film transistor due to the spectral properties of backlight sources', J. Kor. Phys. Soc., Vol. 54, No. 5, p. 1829, 2009 https://doi.org/10.3938/jkps.54.1829
- N. Yoshida, Y. Shimizu, T. Honda, T. Yokoi, and S. Nomoura, 'A study of absorption coefficient spectra in a-Si:H films near the transition from amorphous to crystalline phase measured by resonant photothermal bending spectroscopy', J. Non-Cryst. Solids, Vol. 354, p. 2164, 2008 https://doi.org/10.1016/j.jnoncrysol.2007.10.039
- J. Melskens, G. van Elzakker, Y. Li, and M. Zeman, 'Analysis of hydrogenated amorphous silicon thin films and solar cells by means of fourier transform photocurrent spectroscopy', Thin Solid Film, Vol. 516, p. 6877, 2008 https://doi.org/10.1016/j.tsf.2007.12.049