한국표면공학회지 (Journal of Surface Science and Engineering)

  • 제42권1호
  • /
  • Pages.1-7
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  • 2009
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  • 1225-8024(pISSN)
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  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
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표면처리된 흑연 보트를 이용한 알루미늄의 증발 특성

Evaporation Characteristics of Aluminum by Using Surface-treated Graphite Boat

  • 정재인 (포항산업과학연구원 설비자동화연구본부) ;
  • 양지훈 (포항산업과학연구원 설비자동화연구본부)
  • Jeong, J.I. (Facility & Automation Research Division, Research Institute of Industrial Science & Technology) ;
  • Yang, J.H. (Facility & Automation Research Division, Research Institute of Industrial Science & Technology)
  • 발행 : 2009.02.28
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초록

Resistive heating sources are widely used to prepare thin films by vapor deposition because they are cheap, and easy to install and handle in vacuum system. Graphite is one of materials used to make the resistive heating source, but until now only limited applications have been possible as it reacts easily with evaporating materials at high temperature. In this study, evaporation characteristics of aluminum have been investigated by using graphite boat thermally treated with BN powder. The employed graphite boat has been prepared by spray-coating BN power onto the cavity surface of the boat and thermal treatment with aluminum in vacuum at the temperature of more than $1400^{\circ}C$. The voltage-current characteristics as well as resistivity changes of the graphite boat have been investigated during aluminum evaporation according to the applied voltage and time. The evaporation aspect has been picturized during flash evaporation for 40 seconds based on the characterization results. The evaporation rate of the graphite boat has been compared with that of BN boat. The graphite boat showed some different characteristics compared with BN boat, in that the evaporation occurred at the last stage of flash evaporation. The film appearance according to the applied voltage has been compared, and also the reflectance of the resulting film has been investigated according to the film thickness. It has been found that the graphite boat thermally treated with BN powder can be used for aluminum evaporation without problem.

키워드

참고문헌

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