한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제26권2호
  • /
  • Pages.109-117
  • /
  • 2009
  • /
  • 1225-9071(pISSN)
  • /
  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

자기예압 공기베어링 스테이지의 3 자유도 운동오차 측정 및 능동 보정

Measurement and Active Compensation for 3-DOF Motion Errors of an Air Bearing Stage with Magnetic Preloads

  • 노승국 (한국기계연구원 지능형생산시스템연구본부) ;
  • 김수현 (한국과학기술원 기계공학과) ;
  • 곽윤근 (한국과학기술원 기계공학과) ;
  • 박천홍 (한국기계연구원 지능형생산시스템연구본부)
  • Ro, Seung-Kook (Intelligent Machine Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Kim, Soo-Hyun (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Kwak, Yoon-Keun (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Park, Chun-Hong (Intelligent Machine Systems Research Division, Korea Institute of Machinery and Materials)
  • 발행 : 2009.02.25
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

This paper presents a linear air bearing stage with compensated motion errors by active control of preloads generated by magnetic actuators with combination of permanent and electromagnets. A 1-axis linear stage motorized with a linear motor with 240mm of travel range is built for verifying this design concept and tested its performances. The three motions of the table are controlled with four magnetic actuators driven by current amplifiers and a DSP based digital controller. Three motion errors were measured combined method with laser interferometer and two-probe method with $0.085{\mu}m$ of repeatability for straightness error. The measured motion errors were modeled as functions of the stage position, and compensation were carried out with feedforward control because the characteristics of the motion control with magnetic actuators are linear and independent for each degree-of-freedoms. As the results, the errors were reduced from $1.09{\mu}m$ to $0.11{\mu}m$ for the vertical motion, from 9.42 sec to 0.18 sec for the pitch motion and from 2.42 sec to 0.18 sec for roll motion.

키워드

참고문헌

  1. Wunsch, H. L., "The Design of Air Bearing and Their Application to Measuring Instruments and Machine Tools," International J. of Machine Tool Design and Research, Vol. 1, pp. 198-212, 1961 https://doi.org/10.1016/0020-7357(61)90003-8
  2. Fukada, S. and Nishimura, K., "Nanometric Positioning over a One Millimeter Stroke Using a Flexure Guide and Electromagnetic Linear Motor," International J. of Precision Engineering and Manufacturing, Vol. 8, No. 2, pp. 49-53, 2007
  3. Park, C. H., Lee, C. H. and Lee, H., "Corrective Machining Algorithm for Improving the Motion Accuracy of Hydrostatic Table," J. of KSPE, Vol. 19, No. 6, pp. 62-69, 2002
  4. Yamaguchi, J., Sato, K., Aoyama, H. and Shimokobe, A., "Measurement and Control of Straight Motion Accuracy Using a Liquid Surface for Absolute Reference," J. of JSPE, Vol. 57, No. 3, pp. 128-133, 1991
  5. Oiwa, T. and Kato, M., "Squeeze Air Bearing Based on Ultrasonic Oscillation: Motion Error Compensation Using Amplitude Modulation," Review of Science Instruments, Vol. 75, No. 11, pp. 4615-4620, 2004 https://doi.org/10.1063/1.1765762
  6. Mizumoto, H., Tanaka, H., Okuno, K., Matsumura, T. and Kawakami, R., "An Infinite Stiffness Aerostatic Bearing with an Exhaust Control Restrictor," J. of JSPE, Vol. 57, No. 11, pp. 164-169, 1991
  7. Mizumoto, H., Ari, S., Yamamoto, T., Takata, Y. and Kami, Y., "An Ultraprecision Aerostatic Guideway Controlled by Active Inherent Restrictors," J. of JSPE, Vol. 63, No. 11, pp. 1543-1547, 1997 https://doi.org/10.2493/jjspe.63.1543
  8. Mizumoto, H., Yabuya, M., Kami, Y. and Ari, S., "Ultraprecision Positioning System Using Aerostatic Guideway as Motion-Reduction Mechanism," J. of JSPE, Vol. 67, No. 9, pp. 1524-1529, 2001 https://doi.org/10.2493/jjspe.67.1524
  9. Mizumoto, H., Yabuta, Y., Ari, S., Yabuya, M. and Tazoe, Y., "A Dual-Mode Pico-Positioning System Using Active Aerostatic Coupling," International J. of Precision Engineering & Manufacturing, Vol. 8, No. 2, pp. 32-37, 2007
  10. Hara, S., Kwakami, R., Echigo, K. and Kubo, M., "The Accuracy Improvement of Porous Air Bearing by Magnetic Compensation," Proceeding of 5th Symposium on Dynamics Related with Magnetic Force, Japan Society of AEM, pp. 305-308, 1993
  11. Satomi, T., "Studies on the Aerostatic Guiding System: Improvement of Damping Characteristics and Prevention of Self-excited Vibration by Electromagnetic Control," J. of JSPE, Vol. 51, No. 12, pp. 2259-2264, 1985 https://doi.org/10.2493/jjspe1933.51.2259
  12. Lee, S. Q. and Gweon, D. G., "A New 3-DOF Z-tilts Micro Positioning System Using Electromagnetic Actuators and Air Bearings," Precision Engineering, Vol. 24, No. 1, pp. 24-31, 2000 https://doi.org/10.1016/S0141-6359(99)00022-7
  13. Park, C. H., Oh, Y. J., Shamoto, E. and Lee, D. W., "Compensation for Five DOF Motion Errors of a Hydrostatic Feed Table by Utilizing Actively Controlled Capillaries," Precision Engineering, Vol. 30, No. 3, pp. 299-305, 2006 https://doi.org/10.1016/j.precisioneng.2005.10.002
  14. Park, C. H. and Lee, H., "Motion Error Analysis of the Porous Air Bearing Stages Using the Transfer Function," J. of KSPE, Vol. 21, No. 7, pp. 185-194, 2004
  15. Ro, S. K., Kim, S., Kwak, Y. and Park, C. H., "Study on the Air Bearings with Actively Controllable Magnetic Preloads for Ultra-precision Linear Stage," J. of KSPE, Vol. 25, No. 6, pp. 134-142, 2008
  16. Gao, W. and Kiyono, S., "High Accuracy Profile Measurement of a Machined Surface by the Combined Method," Measurement, Vol. 19, No. 1, pp. 55-64, 1996 https://doi.org/10.1016/S0263-2241(96)00066-8
  17. Park, C. H., Chung, J. H., Kim S. T. and Lee, H., "Development of a Submicron Order Straightness Measuring Device," J. of KSPE, Vol. 17, No. 5, pp. 124-130, 2000
  18. Gao, W., Yokoyama, J., Kojima, H. and Kiyono, S., "Precision Measurement of Cylinder Straightness Using a Scanning Multi-probe System," Precision Engineering, Vol. 26, No. 3, pp. 279-288, 2002 https://doi.org/10.1016/S0141-6359(02)00106-X