한국소음진동공학회논문집 (Transactions of the Korean Society for Noise and Vibration Engineering)

  • 제19권1호
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  • Pages.94-100
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  • 2009
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  • 1598-2785(pISSN)
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  • 2287-5476(eISSN)
한국소음진동공학회 (The Korean Society for Noise and Vibration Engineering)
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초기응력을 가진 기저구조물을 이용한 곡면형 압전 유니모프 개발

Development of Curved Shape Piezoelectric Unimorph Using Pre-stressed Substrate

  • 발행 : 2009.01.20
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초록

This paper proposes a novel curved shape piezoelectric unimorph using a new fabrication method. Instead of using thermal coefficient mismatch, which has been used for conventional processes for curved shape unimorphs, we used pre-stressed substrates and the room temperature adhesion process. A difference of the mechanical strains between the substrate and the piezoelectric layer makes the final manufactured unimorph get curved. Several performance tests of the proposed unimorph actuators were accomplished and the test results showed the proposed unimorph actuator got comparable actuation capability compared with conventional curved shape actuators.

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참고문헌

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