Bulletin of the Korean Chemical Society

  • 제30권1호
  • /
  • Pages.114-118
  • /
  • 2009
  • /
  • 0253-2964(pISSN)
  • /
  • 1229-5949(eISSN)
대한화학회 (Korean Chemical Society)
권호 표지
DOI QR코드

DOI QR Code

Preparation of ZnO Thin Films Using Zn/O-containing Single Precursorthrough MOCVD Method

  • 발행 : 2009.01.20
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

A new Zn/O single source precursor, TMEDA-Zn$(eacac)_2$, has been synthesized by using N, N, N’, N’-tetramethylethylendiamine (TMEDA), sodium ethyl-acetoacetate, and $ZnCl_2$. From this organometallic precursor, ZnO thin films have been successfully grown on Si (100) substrates through the metal organic chemical vapor deposition (MOCVD) method at relatively mild conditions in the temperature range of 390~430 ${^{\circ}C}$. The synthesized ZnO films have been found to possess average grain sizes of about 70 nm with an orientation along the c-axis. The precursor and ZnO films are characterized through infrared spectroscopy, nuclear magnetic resonance spectroscopy, EI-FAB-spectroscopy, elemental analyses, thermal analysis, X-ray diffraction, and field emission scanning electron microscopic analyses.

키워드

참고문헌

  1. Cheng, X. L.; Zhao, H.; Huo, L. H.; Gao, S.; Zhao, J. G. Sens. Actuators B 2004, 102, 248 https://doi.org/10.1016/j.snb.2004.04.080
  2. Yan, Z.; Song, Z.; Liu, W.; Ren, H.; Gu, N.; Zhou, X.; Zhang, L.; Wang, Y.; Feng, S.; Lai, L.; Chen, J. Appl. Surf. Sci. 2007, 253, 9372 https://doi.org/10.1016/j.apsusc.2007.05.081
  3. Manna, U.; Yoo, J.; Dhungel, S. K.; Gowtham, M.; Gangopadhyay, U.; Kim, K.; Yi, J. J. Korean Phys. Soc. 2005, 46, 1378
  4. Allah, F. K.; Abe, S. Y.; Nunez, C. M.; Khelil, A.; Cattin, L.; Morsli, M.; Bernede, J. C.; Bougrine, A.; Valle, M. A.; Diaz, F. R. Appl. Surf. Sci. 2007, 253, 9241 https://doi.org/10.1016/j.apsusc.2007.05.055
  5. Hikavyy, A.; Clauws, P.; Vanbesien, K.; Visschere, P. De; Williams, O. A.; Daenen, M.; Haenen, K.; Butlere, J. E.; Feygelson, T. Diam. Relat. Mat. 2007, 16, 983 https://doi.org/10.1016/j.diamond.2006.11.035
  6. Vasco, E.; Bo1hme, O.; Roman, E. J. Phys. Chem. C 2007, 111, 3505 https://doi.org/10.1021/jp0662294
  7. Xiu, F. X.; Yang, Z.; Zhao, D. T.; Liu, J. L.; Alim, K. A.; Balandin, A. A.; Itkis, M. E.; Haddon, R. C. J. Electron. Mater. 2006, 35, 691 https://doi.org/10.1007/s11664-006-0122-0
  8. Liua, Y.; Liua, Y.; Zhanga, J.; Lua, Y.; Shena, D.; Fana, X. J. Cryst. Growth 2006, 290, 405 https://doi.org/10.1016/j.jcrysgro.2006.02.018
  9. Yu, M.; Xu, H. A.; Wang, H.; Yan, H. Surf. Rev. Lett. 2006, 13, 369 https://doi.org/10.1142/S0218625X06008335
  10. Ji, Z.; Zhao, S.; Wang, C.; Liu, K. Mater. Sci. Eng. B 2005, 117, 63 https://doi.org/10.1016/j.mseb.2004.10.016
  11. Lin, K. M.; Tsai, P. Mater. Sci. Eng. B 2007, 139, 81 https://doi.org/10.1016/j.mseb.2007.01.050
  12. Georgobiani, A. N.; Gruzintsev, A. N.; Kozlovskii, V. I.; Makovei, Z. I.; Red'kin, A. N.; Skasyrskii, Ya. K. Inorg. Mater. 2006, 42, 750 https://doi.org/10.1134/S0020168506070119
  13. Malandrino, G.; Blandino, M.; Perdicaro, L. M. S.; Fragala, I. L.; Rossi, P.; Dapporto, P. Inorg. Chem. 2005, 44, 9684 https://doi.org/10.1021/ic051175i
  14. Hu, J.; Gordon, R. G. Solar Cells 1991, 30, 437 https://doi.org/10.1016/0379-6787(91)90076-2
  15. Hu, J.; Gordon, R. G. J. Appl. Phys. 1992, 71, 880 https://doi.org/10.1063/1.351309
  16. Jain, S.; Kodas, T. T.; Hampden-Smith, M. Chem. Vap. Deposition 1998, 4, 51 https://doi.org/10.1002/(SICI)1521-3862(199803)04:02<51::AID-CVDE51>3.3.CO;2-K
  17. Auld, J.; Houlton, D. J.; Jones, A. C.; Rushworth, S. A.; Malik, M. A.; O'Brien, P.; Critchlow, G. W. J. Mater. Chem. 1994, 4, 1249 https://doi.org/10.1039/jm9940401249
  18. Sato, H.; Minami, T.; Miyata, T.; Takata, S.; Ishii, M. Thin Solid Films 1994, 246, 65 https://doi.org/10.1016/0040-6090(94)90733-1
  19. Gulino, A.; Castelli, F.; Dapporto, P.; Rossi, P.; Fragala, I. Chem. Matter. 2000, 12, 548 https://doi.org/10.1021/cm991154k
  20. Ni, J.; Yan, H.; Wang, A.; Yang, Y.; Stern, C. L.; Metz, A. W.; Jin, S.; Wang, L.; Marks, T. J.; Ireland, J. R.; Kannewurf, C. R. J. Am. Chem. Soc. 2005, 127, 5613 https://doi.org/10.1021/ja044643g
  21. Kim, K. S.; Jeong, H. C.; Cho, J. Y.; Kang, D. H.; Kim, H. K.; Yoo, H. M.; Shim, I. W. Bull. Korean Chem. Soc. 2003, 24, 647 https://doi.org/10.5012/bkcs.2003.24.5.647
  22. Cho, J. Y.; Jeong, H. C.; Kim, K. S.; Kang, D. H.; Kim, H. K.; Shim, I. W. Bull. Korean Chem. Soc. 2003, 24, 645 https://doi.org/10.5012/bkcs.2003.24.5.645
  23. Kim, H. K.; Jeong, H. C.; Kim, K. S.; Yoon, S. H.; Lee, S. S.; Seo, K. W.; Shim, I. W. Thin Solid Films 2005, 478, 72 https://doi.org/10.1016/j.tsf.2004.10.010
  24. Lee, S. S.; Seo, K. W.; Park, J. P.; Kim, S. K.; Shim, I.-W. Inorg. Chem. 2007, 46, 1013 https://doi.org/10.1021/ic061445c
  25. Sheldrick, G. M. SHELXS-97, A Program for the Solution of Crystal Structures; University Gottingen: Gottingen, Germany, 1997
  26. Sheldrick G. M. SHELXL-97, A Program for Crystal Structure Refinement; University Gottingen: Gottingen, Germany, 1997
  27. Farrugia, L. J. J. Appl. Crystollogr. 1998, 32, 837
  28. Brown, I. D.; Altermatt, D. Acta Crystallogr. B 1985, 41, 244 https://doi.org/10.1107/S0108768185002063
  29. Brese, N. E.; O'Keeffe, M. Acta Crystallogr. B 1991, 47, 192 https://doi.org/10.1107/S0108768190011041
  30. Nakamoto, K. Infrared and Raman Spectra of Inorganic and Coordination Compounds, 5th ed.; John Wiley & Sons Inc.: 1997; part B, pp 91-93
  31. Choi, I. H. J. Korea Phys. Soc. 2005, 47, 696
  32. Grummitt, O.; Perz, O.; Mehaffey, J. J. Org. Prep. Proceed. Int. 1972, 4, 299 https://doi.org/10.1080/00304947209458282
  33. Lim, W. T.; Lee, C. H. Thin Solid Films 1999, 12, 353
  34. Puchert, M. K.; Timbrell, P. Y.; Lamb, R. N. J. Vac. Sci. Technol. A 1996, 14, 2220 https://doi.org/10.1116/1.580050

피인용 문헌

  1. Bis[methyl 3-(propylamino)but-2-enoato]zinc vol.67, pp.12, 2011, https://doi.org/10.1107/S160053681104520X
  2. Second-harmonic Generation and Multiphoton Induced Photoluminescence in ZnO vol.30, pp.10, 2009, https://doi.org/10.5012/bkcs.2009.30.10.2199
  3. Effect of temperature on morphologies and optical study of ZnO thin films deposited by aerosol assisted chemical vapor deposition technique vol.36, pp.2, 2009, https://doi.org/10.1088/1361-6641/abcdfa