전해 도금된 주석 솔더 범프의 계면 반응과 전단 강도에 미치는 UBM의 효과

Effect of Under Bump Metallization (UBM) on Interfacial Reaction and Shear Strength of Electroplated Pure Tin Solder Bump

  • 김유나 (성균관대학교 신소재공학부) ;
  • 구자명 (성균관대학교 신소재공학부) ;
  • 박선규 (성균관대학교 사회환경시스템공학과) ;
  • 정승부 (성균관대학교 신소재공학부)
  • Kim, Yu-Na (School of Advanced Materials Science & Engineering, Sungkyunkwan University) ;
  • Koo, Ja-Myeong (School of Advanced Materials Science & Engineering, Sungkyunkwan University) ;
  • Park, Sun-Kyu (School of Civil and Environmental Engineering, Sungkyunkwan University) ;
  • Jung, Seung-Boo (School of Advanced Materials Science & Engineering, Sungkyunkwan University)
  • 투고 : 2007.10.09
  • 발행 : 2008.01.22

초록

The interfacial reactions and shear strength of pure Sn solder bump were investigated with different under bump metallizations (UBMs) and reflow numbers. Two different UBMs were employed in this study: Cu and Ni. Cu6Sn5 and Cu3Sn intermetallic compounds (IMCs) were formed at the bump/Cu UBM interface, whereas only a Ni3Sn4 IMC was formed at the bump/Ni UBM interface. These IMCs grew with increasing reflow number. The growth of the Cu-Sn IMCs was faster than that of the Ni-Sn IMC. These interfacial reactions greatly affected the shear properties of the bumps.

키워드

과제정보

연구 과제 주관 기관 : 산업자원부

참고문헌

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