한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제21권11호
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  • Pages.973-976
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  • 2008
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  • 1226-7945(pISSN)
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  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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PECVD로 합성한 다이아몬드상 카본박막의 전기적 특성

Electrical Properties of Diamond-like Carbon Thin Film synthesized by PECVD

  • 발행 : 2008.11.01
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초록

In addition to its similarity to genuine diamond film, diamond-like carbon (DLC) film has many advantages, including its wide band gap and variable refractive index. In this study, DLC films were prepared by the RF PECVD (Plasma Enhanced Chemical Vapor Deposition) method on silicon substrates using methane ($CH_4$) and hydrogen ($H_2$) gas. We examined the effects of the RF power on the electrical properties of the DLC films. The films were deposited at several RF powers ranging from 50 to 175 W in steps of 25 W. The leakage current of DLC films increased at higher deposition RF power. And the resistivities of DLC films grown at 50 W and 175 W were $5\times10^{11}$ ${\Omega}cm$ and $2.68\times10^{10}$ ${\Omega}cm$, respectively.

키워드

참고문헌

  1. A. Grill, "Diamond-like carbon: state of the art", Diam. Relat. Mater., Vol. 8, p. 428, 1999 https://doi.org/10.1016/S0925-9635(98)00262-3
  2. T. Mori and Y. Namba, "Crystal structure of diamondlike carbon films prepared by ionized deposition from methane gas", J. Appl. Phys., Vol. 55, p. 3276, 1984 https://doi.org/10.1063/1.333385
  3. K. E. Spear and J. P. Dismukes, "Synthetic Diamond: Emerging CVD Science and Technology", John Wiley & Sons, New York, 1994
  4. J. Robertson, "Amorphous carbon", Curr. Opin. Solid. St. M., Vol. 1, p. 557, 1996 https://doi.org/10.1016/S1359-0286(96)80072-6
  5. Y. Lifshitz, G. D. Lempert, S. Rotter, I. Avigal, C. Uzan-Saguy, R. Kalish, J. Kulik, D. Marton, and J. W. Rabalais, "The effect of ion energy on the diamond-like/graphitic ($sp^{3}/sp^{2}$) nature of carbon films deposited by ion beams", Diam. Relat. Mater., Vol. 3, p. 542, 1994 https://doi.org/10.1016/0925-9635(94)90220-8
  6. J. Robertson, "Electronic structure of diamond- like carbon", Diam. Relat. Mater., Vol. 6, p. 212, 1997 https://doi.org/10.1016/S0925-9635(96)00627-9
  7. 심경석, 이상렬, "펄스 레이저 증착법을 이용한 내마모성 DLC 박막의 제작 및 특성분석", 전기전자재료학회논문지, 12권, 5호, p. 456, 1999
  8. T. Takeno, H. Miki, T. Takagi, and H. Onodera, "Electrically conductive properties of tungsten-containing diamond-like carbon films", Diam. Relat. Mater., Vol. 15, No. 11-12, p. 1902, 2006 https://doi.org/10.1016/j.diamond.2006.06.020
  9. W. S. Choi, J. Heo, I. Chung, and B. Hong, "The effect of RF power on tribological properties of the diamond-like carbon films", Thin Solids Films, Vol. 475, p. 287, 2005 https://doi.org/10.1016/j.tsf.2004.07.033

피인용 문헌

  1. Large-area Uniform Deposition of Amorphous Hydrogenated Carbon Films using a Plasma CVD Method vol.22, pp.5, 2009, https://doi.org/10.4313/JKEM.2009.22.5.411