References
- C. Molpeceres, S. Lauzurica, J. L. Ocana, J. J. Gandia, L. Urbina, and J. Carabe, "Microprocessing of ITO and a-Si thin films using ns laser sources," J. Micromech. Microeng., 15: 1271-1278, 2005 https://doi.org/10.1088/0960-1317/15/6/019
- H. Choi, D. Farson, J. Bovatsek, A. Arai, and D. Ashkenasi Direct-write patterning of indium- tin-oxide film by high pulse repetition frequency femtosecond laser ablation, Applied Optics, 46(23): 5792-5799, 2007 https://doi.org/10.1364/AO.46.005792
- B. Stuart, M.F., A. Rubenchik, B. Shore, and M. Perry, Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses. Physical Review Letters, 74(12): 2248-2252, 1995 https://doi.org/10.1103/PhysRevLett.74.2248
- J. Ihlemann, a.B.W.-R., Excimer laser micro machining of inorganic dielectrics. Applied surface science, 106: 282-286, 1996 https://doi.org/10.1016/S0169-4332(96)00422-9
- G. Kopitkovas, T.L., C. David, A. Wokaun, and J. Gobrecht, Surface micromachining of UV transparent materials. Thin solid films, 453: 31-35, 2004 https://doi.org/10.1016/j.tsf.2003.11.074
- A. Glover, E.I., and J. Piper, High speed UV micro machining of polymers with frequency doubled copper vaport lasers. IEEE journal of quantum electronic, 1(3): 830-836, 1995 https://doi.org/10.1109/2944.473666
- K. Naessens, H.O., P. Daele, and R. Baets, Flexible fabrication of microlenses in polymer layers with excimer laser ablation. Applied surface science, 208-209: 159-164, 2003 https://doi.org/10.1016/S0169-4332(02)01359-4
- X. Liu, D.D., and G. Mourou, Laser ablation and micromachining with ultrashort laser pulses. IEEE journal of quantum electronics, 33(10): 1706-1716, 1997
- B. Stuart, M.F., A. Rubenchik, B. Shore, and M. Perry, Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses. Physical Review Letters, 74(12): 2248-2252, 1995 https://doi.org/10.1103/PhysRevLett.74.2248
- S. Nolte, C.M., H. Jacobs, A. Tunnermann, B. Chichkov, B. Wellegehausen, and H. Welling, Ablation of metals by ultrashort laser pulses. J. Opt. Soc. Am. B, 14(10): 2716-2722, 1997 https://doi.org/10.1364/JOSAB.14.002716
- C. Momma, S.N., B. Chichkov, F. Alvensleben, and A. Tunnermann, Precise laser ablation with ultrashort pulses. Applied surface science, 109(110): 15-19, 1997 https://doi.org/10.1016/S0169-4332(96)00613-7
- T. Tamaki, W. Watanabe, J. Nishi and K. Itoh, Welding of Transparent Materials Using Femtosecond Laser Pulses, Japanese Journal of Applied Physics, 44(22): 687-689, 2005 https://doi.org/10.1143/JJAP.44.L687
- T. Tamki, W. Watanabe, K. Ioh, Laser microwelding of transparent materials by a localized heat accumulation effect using a femtosecond fiber laser at 1558nm, Optics Express, 14(22): 10468-10476, 2006
- T. Itina, J.H., Ph. Delaporte, and M. Sentis, Modeling of metal ablation induced by ultrashort laser pulses.Proceedings of symposium H on photonic processing of surfaces - Thin films and devices, E-MRS: 453-454, 2004
- F. Vidal, T.J., S. Laville, O. Barthelemy, M. Chaker, B. LeDegoff, J. Margot, and M. Sabsabi, Critical-point phase separation in laser ablation of conductors. Physical Review Letters, 86(12): 2573-2576, 2001 https://doi.org/10.1103/PhysRevLett.86.2573
- N. Bulgakova, Possibility of rarefaction shock wave under short pulse laser ablation of solids. Physical Review E, 60(4): R3498 - R3500, 1999 https://doi.org/10.1103/PhysRevE.60.R3498
- E. Gamaly, A.R., B. Luther-Davies, and V. Tikhonchuk, Ablation of solids by femtosecond lasers: Ablation mechnasim and ablation thresholds for metals and dielectrics. Physics of plasma, 9(3): 949-957, 2002 https://doi.org/10.1063/1.1447555
- L. Schlessinger, J. W, Inverse-bremsstahlung absorption rate in an intense laser field. Physical Review A, 20(1934-1945), 1979 https://doi.org/10.1103/PhysRevA.20.1934
- S. Rand, Inverse Bremsstrahlung with High- Intensity Radiation Fields. Physical Review Letters, 136(1B): B231-B237, 1964
- S. Valette, R.H., N. Huot, E. Audouard, and R. Fortunier, 2D Calculations of the thermal effects due to femtosecond laser-metal interaction. Applied surface science, 247: 238-242, 2005 https://doi.org/10.1016/j.apsusc.2005.01.080
- I. Burakov, N.B., R. Stoian, A. Rosenfeld, and I. Hertel, Theoretical invesitication of material modification using temporally shaped femtosecond laser pulses. Appl. Phys. A, 81: 1639-1645, 2005 https://doi.org/10.1007/s00339-005-3320-3
- N. Singh, D.A., J. Schiffern, and D. Doerr, Femtosecond laser productrion of metal surfaces having unique surface structures that are broadband absorvers. Journal of Laser Applications, 18(3): 242-244, 2006 https://doi.org/10.2351/1.2227017
- S. Kirkwood, A.V.P., Y. Tsui, and R. Fedosejevs, Single and multiple shot near-infrared femtosecond laser pulse ablation thresholds of copper. Appl. Phys. A, 81(729-735), 2005 https://doi.org/10.1007/s00339-004-3135-7
- Y. Jee, M.B., and R. Walser, Laser-induced damage on single-crystal metal surfaces. Optical physics, 5(3): 648-659, 1988
- H. Huang, H.Z., and Y. Liu, Experimental investigations machinability of Ni50.6Ti49.4. Smart Materials and Structures, 14: S297-S301, 2005 https://doi.org/10.1088/0964-1726/14/5/01910.1088/0964-1726/14/5/019
- P. Mannion, J.M., E. Coyne, G. O'Connor, and T. Glynn, The effect of damage accumulation behabiour on ablation thresholds and damage morphology in ultrafast laser micro-machining of common metals in air. Applied surface science, 223: 275-287, 2004 https://doi.org/10.1016/j.apsusc.2004.03.229
- H. Choi, J. Johnson, J. Nam, D. Farson, J. Lannutti, Structuring electrospun polycaprolactone nanofiber tissue scaffolds by femtosecond laser ablation. Journal of Laser Applications, 2007
- C. Schaffer, A.B.a.E.M., Laser induced breakdown and damage in bulk transparent materials induced by tightly focused femtosecond laser pulses. Meas. Sci. Technol., 12: 1784-1794, 2001 https://doi.org/10.1088/0957-0233/12/11/305
- M. Lenzner, J.K., S. Sartania, Z. Cheng, C. Spielmann, G. Mourou, W. Kautek, and F. Krausz, Femtosecond Optical Breakdown in Dielectrics. Physical Review Letters, 80(18): 4076-4079, 1998 https://doi.org/10.1103/PhysRevLett.80.4076
- A. Zoubir, C.R., R. Grodsky, K. Richardson, M. Richardson, T. Cardinal, and M. Couzi, Laserinduced defects in fused silica by femtosecond IR irradiation. Physical Review B, 73: 224117(5), 2006 https://doi.org/10.1103/PhysRevB.73.224117
- C. Aguilar, Y.L., S. Mao, and S. Chen, Direct micro-patterning of biodegradable polymers using ultraviolet and femtosecond lasers. Biomaterials, 26: 7642-7649, 2005 https://doi.org/10.1016/j.biomaterials.2005.04.053
- A. Rosenfeld, M.L., R. Stoian, and D. Ashkenasi, Ultrashort laser pulse damage threshold of transparent materials and the role of incubation. Appl. Phys. A, 69(Suppl.): S373-S376, 1999 https://doi.org/10.1007/s003390051419
- D. Ashkenasi, M.L., R. Stoian, and A. Rosenfeld, Surface damage threshold and structuring of dielectrics using femtosecond laser pulses: the role of incubation. Appl. Surface Sci., 150: 101-106, 1999 https://doi.org/10.1016/S0169-4332(99)00228-7
- S. Campbell, F.D., D. Hand, and D. Reid, Single-pulse femtosecond laser machining of glass. J. Opt. A: Pure Appl. Opt., 7: 162 - 168, 2005 https://doi.org/10.1088/1464-4258/7/4/002
- A. Ben-Yakar, A.H., J. Ashmore, R. Byer, and H. Stone, Thermal and fluid processes of a thin melt zone during femtosecond laser ablation of glass : the formation of rims by single laser pulses. J. Appl. Phys. D, 40: 1447-1459, 2007 https://doi.org/10.1088/0022-3727/40/5/021
- D. Gomez, I.G., I. Lizuain, and M. Ozaita, Femtosecond laser ablation for microfluidics. Optical engineering, 44(5): 051105:1-8, 2005
- F. Costache, a.J.R., Femtosecond laser induced Coulomb explosion from calcium fluoride. Thin solid films, 453: 334-339, 2004 https://doi.org/10.1016/j.tsf.2003.11.096
- Chen J, Farson DF, Rokhlin SI, Femtosecond laser stimulation of electrical discharges in submicron and nanoscale gaps, APPLIED PHYSICS LETTERS, 90(20), 201505, 2007 https://doi.org/10.1063/1.2740480
- D. Farson, H. Choi, S. Rokhlin, Electrical discharges between platinum nanoprobe tips and gold films at nanometre gap lengths, Nano-technolgy, 17, 132- 139, 2006
- Cumpston et al, Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication, Nature Vol. 398, 51-53, 1999 https://doi.org/10.1038/17989
- http://www.laser-zentrum-hannover.de
- H. Zhang, M. Tang, J. McCoy, and T. Her, Deposition of tungsten nanogratings induced by a single femtosecond laser beam, Optical Express 15(10), 5937-5947, 2007 https://doi.org/10.1364/OE.15.005937
Cited by
- Porous Bio-degradable Nano-fiber Machining by Femtosecond Laser vol.29, pp.3, 2012, https://doi.org/10.7736/KSPE.2012.29.3.339