Journal of Biosystems Engineering

Korean Society for Agricultural Machinery (한국농업기계학회)
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Development of Surface Acoustic Wave Sensor for Viscosity Measurement of Low Viscose Liquid Using Love Wave

Love파를 이용한 저점성 유체 점도 측정용 표면 탄성파 센서 개발

  • Lee, Sang-Dae (Safety Metrology Group, Division of Metrology for Quality Life, Korea Research Institute of Standard and Science) ;
  • Kim, Ki-Bok (Safety Metrology Group, Division of Metrology for Quality Life, Korea Research Institute of Standard and Science) ;
  • Lee, Dae-Su (Safety Metrology Group, Division of Metrology for Quality Life, Korea Research Institute of Standard and Science)
  • Published : 2008.08.25
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Abstract

Love wave is one of the shear horizontal waves and it can propagate between two layers in liquid without energy loss. The SAW (surface acoustic wave) sensor using Love wave is very useful for real time measurement of the viscosity of liquid with high sensitivity. In this study, the 77 MHz and 155 MHz Love wave SAW sensors were fabricated and use to measure the viscosity of low viscous liquid. To generate the surface acoustic wave, the inter-digital transducers were fabricated on the quartz crystal wafer. In order to obtain the optimal thickness of the coating film (novolac photoresist) generating the Love wave on the surface of SAW device, theoretical calculation was performed. The performances of fabricated Love wave SAW sensors were tested. As test liquid, pure water and glycerol solutions having different concentrations were used. Since the determination coefficients of the regression equations for measuring the viscosity of liquid are greater than 0.98, the developed Love wave SAW sensors in this study will be very useful for precise measurement of viscosity of liquid.

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References

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