References
- Lee, N-K., Choi, T-H., Lee H-J., Choi, S-W., Park, H-J., La, W-K., 2005, "Development of Micro Metal Forming Manufacturing System," Proc. of KSMTE Spring Conference, pp. 383-388
- Park, J. K. and Lee, D. W., 2004, "Micro-factory," Trans. of KSMTE, Vol. 13, No. 1, pp. 18-24
- Ehrfeld, W., Begemann, B., Berg, U., Lofh, A., Michel, F., and Nienhaus, M., 2001, "Highly Parallel Mass Fabrication and Assembly of Microdevices," Microsystem Technologies, Vol. 7, pp. 145-150 https://doi.org/10.1007/s005420000080
- Fujita, F., 1998, "Microactuators and Micromachines," Proceedings of IEEE, Vol. 86, No. 8, pp. 1721-1732 https://doi.org/10.1109/5.704278
- Saotome, Y. and Inoue, A., 1994, "Superplastic Micro-forming of Microstructures," IEEE, pp. 343-348
-
Saotome, Y. and Iwazaki, H., 2000, "Superplastic Extrusion of Microgear Shaft of 10
${\mu}m$ in Module," Microsystem Technologies, Vol. 6, pp. 126-129 https://doi.org/10.1007/s005420050180 - Saotome, Y. and Iwazaki, H., 2001, "Superplastic Backward Microextrusion of Microparts for Microelectro- mechanical systems," J. Materials Processing Technology, Vol. 119, pp. 307-311 https://doi.org/10.1016/S0924-0136(01)00957-8
- Mohamed, F. A., Ahmed, M., and Langdon, T. G., 1977, "Factors Influencing Ductility in the Superplastic Zn-22 pct Al Eutectoid," Metall. Trans., Vol. 8A, pp. 933-938
- Engel, U. and Eckstein, R., 2002, "Microforming-from Basic Research to Its Realization," J Materials Processing Technology, Vol. 125, pp. 35-44 https://doi.org/10.1016/S0924-0136(02)00415-6
- Messner, A., Engel, U., Kals, R., and Vollertsen, F, 1994, "Size Effect in the FE-simulation of Microforming Processes," J Materials Processing Technology, Vol. 45, pp. 371-379 https://doi.org/10.1016/0924-0136(94)90368-9