한국표면공학회지 (Journal of the Korean institute of surface engineering)

  • 제41권4호
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  • Pages.142-146
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  • 2008
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  • 1225-8024(pISSN)
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  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
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DC 마그네트론 스터링법을 이용하여 증착한 Ga, Al, In 첨가 ZnO 박막의 특성

Characterization of Ga, Al or In Doped ZnO Films Deposited by DC Magnetron Sputtering

  • Park, Sang-Eun (Department of Materials Science and Engineering, Pusan National University) ;
  • Park, Se-Hun (Department of Materials Science and Engineering, Pusan National University) ;
  • Jie, Lue (Department of Materials Science and Engineering, Pusan National University) ;
  • Song, Pung-Keun (Department of Materials Science and Engineering, Pusan National University)
  • 발행 : 2008.08.31
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초록

Trivalent ions(Ga, Al, In) doped ZnO films were deposited by DC magnetron sputtering on non-alkali glass substrate at substrate temperature of $300^{\circ}C$. We used the different three types of high density($95%{\sim}$) ceramic sintered disks(doped with $Ga_2O_3$; 6.65 wt%, $Al_2O_3$; 3.0 wt%, $In_2O_3$; 9.54 wt%). This study examined the effect of different dopants(Ga, Al, In) on the electrical, structural, and optical properties of the films. The lowest resistivity of $5.14{\times}10^{-4}{\Omega}cm$ and the highest optical band gap of 3.74 eV were obtained by Ga doped ZnO(GZO) film. All the films had a preferred orientation along the(002) direction, indicating that the growth orientation has a c-axis perpendicular to the substrate surface. The average transmittance of the films was more than 85% in the visible range.

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참고문헌

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피인용 문헌

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  2. Electrical resistivity change in Al:ZnO thin films dynamically deposited by bipolar pulsed direct-current sputtering and a remote plasma source vol.28, pp.4, 2010, https://doi.org/10.1116/1.3435326
  3. Effect of Annealing on the Electrical Property and Water Permeability of ZTO/GZO Double-layered TCO Films Deposited by DC, RF Magnetron Co-sputtering vol.45, pp.3, 2012, https://doi.org/10.5695/JKISE.2012.45.3.117
  4. Electrical and Structural Properties of GAZO Films Deposited by DC Magnetron Co-sputtering System with Two Cathodes vol.42, pp.3, 2009, https://doi.org/10.5695/JKISE.2009.42.3.122
  5. The effects of impurity and temperature for transparent conducting oxide properties of Al:ZnO deposited by dc magnetron sputtering vol.86, pp.10, 2012, https://doi.org/10.1016/j.vacuum.2012.02.025
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