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탄소비율에 따른 Diamond-like Carbon Film의 광학적 및 기계적 특성

Optical and Mechanical Properties of Diamond-like Carbon Film with Variation of Carbon Ratio

  • 윤덕용 (성균관대학교 정보통신공학부) ;
  • 박용섭 (성균관대학교 정보통신공학부) ;
  • 최원석 (한밭대학교 전기공학과) ;
  • 홍병유 (성균관대학교 정보통신공학부)
  • 발행 : 2008.09.01

초록

Optical and mechanical properties of diamond-like carbon (DLC) films synthesized by RF plasma enhanced chemical vapor deposition were investigated as a function the C/H ratio in gas mixture. The C/H ratio was varied from 6 to 10 %, adjusting the amount of $CH_4$ and $H_2$ as the source gas. The optical and mechanical properties of DLC films were characterized by UV spectrometer, Ellipsometer and Nano-indenter. The change of the C/H ratio during synthesis of DLC films had many effects on the growth rate, transmittance, refractive index and hardness. The growth rate of the films increased exponentially with the increase in C/H ratio. The hardness of the films showed the tendency to improve with increasing C/H ratio, whereas the transmittance decreased. The refractive index was varied from 2.03 to 2.17, and these refractive indexes close to 2.0 indicates that it can be applied to Si-based solar cell.

키워드

참고문헌

  1. S. M. Mominuzzaman, K. M. Krishna, T. Soga, T. Jimbo, and M. Umeno, "Optical absorption and electrical conductivity of amorphous carbon", Jpn. J. Appl. Phys., Vol. 38, p. 658, 1999 https://doi.org/10.1143/JJAP.38.658
  2. P. Yang, N. Huang, Y. X. Leng, J. Y. Chen, R. K. Y. Fu, S. C. H. Kwok, Y. Leng, and P. K. Chu, "Activation of platelets adhered on amorphous hydrogenated carbon (a-C:H) films synthesized by plasma immersion ion implantation-deposition (PIII-D)", Biomaterials, Vol. 24, p. 2821, 2003 https://doi.org/10.1016/S0142-9612(03)00091-7
  3. Y. S. Park and B. Y. Hong, "Characteristics of hydrogenated amorphous carbon(a-C:H) thin films grown by close field unbalanced magnetron sputtering method", J. of KIEEME (in Korean), Vol. 17, No. 3, p. 278, 2004
  4. W. S. Choi and B. Y. Hong, "A study on tribological properties of diamond-like carbon thin film for the application to solid lubricant of MEMS devices", J. of KIEEME (in Korean), Vol. 19, No. 11, p. 1010, 2006 https://doi.org/10.4313/JKEM.2006.19.11.1010
  5. M. Noda, T. Shinagawa, S. Kawai, and M. Umeno, "Microstructure and optical band gap control of DLC film deposited by pulsed discharge plasma CVD", Dimaond and Related Materials, Vol. 17, p. 646, 2008 https://doi.org/10.1016/j.diamond.2007.08.018
  6. N. I. Klyui, V. G. Litovchenko, A. G. Rozhin, V. N. Dikusha, M. Kittler, and W. Seifert, "Silicon solar cells with antireflection diamond- like carbon and silicon carbide films", Solar Energy Materials & Solar Cells, Vol. 72, p. 597, 2002 https://doi.org/10.1016/S0927-0248(01)00209-4
  7. J. Q. Xi, Martin F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, "Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection", Nature Photonics, Vol. 1, p. 176, 2007 https://doi.org/10.1038/nphoton.2007.26
  8. I. Ay, and H. Tolunay, "Optical transmission measurements on glow-discharge amorphous silicon nitride films", Turk. J. Phy., Vol. 25, p. 215, 2001
  9. J. Zhao and M. A. Green, "Optimized antireflection coatings for high-efficiency silicon solar cells", IEEE Transactions on Electron Devices, Vol. 38, p. 1925, 1991 https://doi.org/10.1109/16.119035
  10. K. R. Lee and K. Y. Eun, "Diamond-like carbon film", Bull. of the Korean Inst. of Met. & Mater., Vol. 6, No. 4, p. 345, 1993
  11. E. F. Motta and I. Pereyra, "Amorphous hydrogenated carbon-nitride films prepared by RF-PECVD in methane-nitrogen atmospheres", J. of Non-Crystalline Solids, Vol. 338-340, p. 525, 2004. https://doi.org/10.1016/j.jnoncrysol.2004.03.034
  12. A. A. Evtukh, V. G. Litovchenko, N. I. Klyui, R. I. Marchenko, and S. Yu. Kudzinovski, "Properties of plasma enhanced chemical vapor deposition diamond-like carbon films as field electron emitters prepared in different regimes", J. Vac. Sci. Technol. B, Vol. 17, No. 2, p. 679, 1999 https://doi.org/10.1116/1.590617
  13. Y. Lifshitz, G. D. Lempert, E. Grossman, H. J. Scheibe, S. Voellmar, B. Schultrich, A. Breskin, R. Chechik, E. Shefer, D. Bacon, R. Kalish, and A. Hoffman, "Optical and photoemission studies of DLC films prepared with a systematic variation of the $sp^{3}:sp^{2}$ composition", Dia. Relat. Mater., Vol. 6, p. 687, 1997 https://doi.org/10.1016/S0925-9635(96)00696-6
  14. S. Kaplan, F. Jansen, and M. Machonkin, "Characterization of amorphous carbon- hydrogen films by solid-state nuclear magnetic resonance", Appl. Phys. Lett., Vol. 47, p. 750, 1985 https://doi.org/10.1063/1.96027