IE interfaces (산업공학)

Korean Institute of Industrial Engineers (대한산업공학회)
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Effective Construction Method of Defect Size Distribution Using AOI Data: Application for Semiconductor and LCD Manufacturing

AOI 데이터를 이용한 효과적인 Defect Size Distribution 구축방법: 반도체와 LCD생산 응용

  • Ha, Chung-Hun (School of Information & Computer Engineering, Hongik University)
  • 하정훈 (홍익대학교 정보컴퓨터공학부)
  • Received : 20070700
  • Accepted : 20071200
  • Published : 2008.06.30
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Abstract

Defect size distribution is a probability density function for the defects that occur on wafers or glasses during semiconductor/LCD fabrication. It is one of the most important information to estimate manufacturing yield using well-known statistical estimation methods. The defects are detected by automatic optical inspection (AOI) facilities. However, the data that is provided from AOI is not accurate due to resolution of AOI and its defect detection mechanism. It causes distortion of defect size distribution and results in wrong estimation of the manufacturing yield. In this paper, I suggest a size conversion method and a maximum likelihood estimator to overcome the vague defect size information of AOI. The methods are verified by the Monte Carlo simulation that is constructed as similar as real situation.

Keywords

References

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