한국레이저가공학회지 (Laser Solutions)
- 제11권2호
- /
- Pages.33-38
- /
- 2008
- /
- 1229-0963(pISSN)
공정 모니터링 광학모듈이 장착된 UV 레이저 미세가공 플랫폼 제작
Fabrication of a UV laser micromachining platform with process-monitoring optical modules
-
Sohn, H.
(Korea Institute of Machinery and Materials) ;
-
Lee, J.H.
(Korea Institute of Machinery and Materials) ;
- Jeong, Y.W. (Korea Institute of Machinery and Materials) ;
- Kim, S.I. (Institute for Advanced Engineering) ;
-
Hahn, J.W.
(Yonsei university)
- 발행 : 2008.06.30
초록
Laser micromachining has increasingly been adopted in various advanced industries where the high-precision machining of large-area, high-density and multi-layered components is in a strong demand. To effectively meet the requirements, the laser micromachining process must be carefully monitored. In order to facilitate the development of a new laser micromachining process and/or a new system, we have fabricated a UV laser micromachining platform that is equipped with optical modules for monitoring the process online. They include a laser power stabilizing module, a module for laser-induced breakdown spectroscopy, and an auto-focusing module.