Laser Solutions (한국레이저가공학회지)

Korean Society of Laser Processing (한국레이저가공학회)
권호 표지

Fabrication of a UV laser micromachining platform with process-monitoring optical modules

공정 모니터링 광학모듈이 장착된 UV 레이저 미세가공 플랫폼 제작

  • Sohn, H. (Korea Institute of Machinery and Materials) ;
  • Lee, J.H. (Korea Institute of Machinery and Materials) ;
  • Jeong, Y.W. (Korea Institute of Machinery and Materials) ;
  • Kim, S.I. (Institute for Advanced Engineering) ;
  • Hahn, J.W. (Yonsei university)
  • Published : 2008.06.30
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Abstract

Laser micromachining has increasingly been adopted in various advanced industries where the high-precision machining of large-area, high-density and multi-layered components is in a strong demand. To effectively meet the requirements, the laser micromachining process must be carefully monitored. In order to facilitate the development of a new laser micromachining process and/or a new system, we have fabricated a UV laser micromachining platform that is equipped with optical modules for monitoring the process online. They include a laser power stabilizing module, a module for laser-induced breakdown spectroscopy, and an auto-focusing module.

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