Journal of Surface Science and Engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
권호 표지
DOI QR코드

DOI QR Code

Characteristics of Ir-Re Thin Films on WC for Lens Glass Molding by Ion Beam Assisted DC Magnetron Sputtering

Ion beam assisted DC magnetron sputtering에 대한 렌즈 유리 성형용 WC 합금의 Ir-Re 박막 특성

  • Published : 2008.06.30
Download PDF
⟨ Previous Next ⟩

Abstract

Ir-Re thin films with Ti interlayer were deposited onto the tungsten carbide substrate by ion beam assisted DC magnetron sputtering. The Ir-Re films were prepared with targets of having two atomic percent of 7:3 and 5:5. The microstructure and surface analysis of the specimen were conducted by using SEM, XRD and AFM. Mechanical properties such as hardness and adhesion strength of Ir-Re thin film also were examined. The interlayer of pure titanium was formed with 100 nm thickness. The film growth of Ir-30at.%Re was faster than that of Ir-50at.%Re in the same deposition conditions. Ir-Re thin films consisted of dense and columnar structure irrespective of the different target compositions. The values of hardness and adhesion strength of Ir-30at.%Re thin film coated on WC substrate were higher than those of Ir-50at.%Re thin film.

Keywords

References

  1. H. Suzuki, S. Kodera, S. Maekawa, N. Morita, E. Sakurai, K. Tanaka, H. Takada, T. Kuriyagawa, K. Syoji, J. Japan Soc, Prec. Engg., 62(4), (1998) 619
  2. S. S. Kim, H. U. Kim, S. H. Jeong, H. H. Kim, J. H. Kim, J. of KIEEME (in Korean), 19(4) (2006) 386 https://doi.org/10.4313/JKEM.2006.19.4.386
  3. M. J. Chen, D. Li, S. Dong, Journal of Materials Processing Technology, 129 (2002) 91-95 https://doi.org/10.1016/S0924-0136(02)00582-4
  4. H. U. Kim, S. H. Jeong, Y. P. Park, S. S. Kim, H. H. Kim, J. H. Kim, J. of KIEEME (in Korean), 19(11) (2006) 1050 https://doi.org/10.4313/JKEM.2006.19.11.1050
  5. H. U. Kim, S. H. Jeong, H. J Kim, J. H Kim, Key Engineering Materials, 345 (2007) 1577 https://doi.org/10.4028/www.scientific.net/KEM.345-346.1577
  6. H. U. Kim, S. S. Kim, H. J Kim, J. H Kim, J. of KlEEME(in Korean), 20(9) (2007) 808 https://doi.org/10.4313/JKEM.2007.20.9.808
  7. William D. Westwood, Sputter Deposition, p. 136-141, AVS New York
  8. Y. I. Chen, J. G. Duh, Surf. Coat. Technol. 46 (1991) 371 https://doi.org/10.1016/0257-8972(91)90178-Y
  9. J. Stallard, S. Poulat, D. G. Teer, Tribology International, 39 (2006) 159-166 https://doi.org/10.1016/j.triboint.2005.04.011

Cited by

  1. Analysis of Characteristics of DLC Coating Thin Film in Tungsten Carbide for Production of Medical Thermal-Infrared Lenses vol.15, pp.6, 2014, https://doi.org/10.4313/TEEM.2014.15.6.344
  2. Characteristic of DLC Thin Film Fabricated by FVAS Method on Tungsten Carbide vol.24, pp.10, 2011, https://doi.org/10.4313/JKEM.2011.24.10.812