대한기계학회논문집A (Transactions of the Korean Society of Mechanical Engineers A)

  • 제32권9호
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  • Pages.754-760
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  • 2008
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  • 1226-4873(pISSN)
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  • 2288-5226(eISSN)
대한기계학회 (The Korean Society of Mechanical Engineers)
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이광자 흡수 광환원 공정을 이용한 마이크로 금속형상 제작의 정밀화에 관한 연구

Improvement of Metallic Micro-Structure Precision Employing Two-photon Induced Photoreduction Process

  • 손용 (한국과학기술원 기계항공시스템학부) ;
  • 임태우 (한국과학기술원 기계항공시스템학부) ;
  • 양동열 (한국과학기술원 기계항공시스템학부) ;
  • ;
  • 이광섭 (한남대학교 생명정보신소재공학과)
  • 발행 : 2008.09.01
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초록

A two-photon induced photoreduction process suggests a possibility for fabricating complicated metallic microstructures which can be applied to 3-D micro-circuits and optical devices, etc. The process employs the photoreduction of silver ions in a metallic solution which is composed of metallic salt ($AgNO_3$) and watersoluble polymer ((poly(4-styrenesulfonique acid) 18wt. % in $H_2O$, $(C_8H_8O_3S)_n$)). In this process, the improvement of the resolution and the uniformity of fabricated metallic structures are important issues. To address these problems, continuous forming window (CFW) is obtained from a parametric study on the conditions of laser power and scanning velocity and the direct seed generation (DSG) method is proposed. Silver nano particles are uniformly generated in a metallic solution through the DSG method, which enables the decrease of a laser power to trigger the photoreduction of silver ions as well as the increase of metal contents in a metallic solution. So the two-photon induced photoreduction property of a metallic solution is improved. Through this work, precise silver patterns are fabricated with a minimum line width of 400 nm.

키워드

참고문헌

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