대한기계학회논문집A (Transactions of the Korean Society of Mechanical Engineers A)

  • 제32권9호
  • /
  • Pages.720-727
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  • 2008
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  • 1226-4873(pISSN)
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  • 2288-5226(eISSN)
대한기계학회 (The Korean Society of Mechanical Engineers)
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체크밸브가 달린 열공압 방식의 PDMS-유리마이크로 펌프에 관한 연구

A Study About PDMS-Glass Based Thermopneumatic Micropump Integrated with Check Valve

  • 고용준 (한양대학교 대학원 기계공학과) ;
  • 조웅 (한양대학교 대학원 기계공학과) ;
  • 안유민 (한양대학교 기계공학과)
  • 발행 : 2008.09.01
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초록

Microfluidic single chip integrating thermopneumatic micropump and micro check valve are developed. The micropump and micorvalve are made of biocompatible materials, glass and PDMS, so as to be applicable to the biochip. By using the passive-type check valve, backward flow and fluid leakage are blocked and flow control is stable and precise. The chip is composed of three PDMS layers and a glass substrate. In the chip, flow channel and pump chamber were made on the PDMS layers by the replica molding technique and pump heater was made on the glass substrate by Cr/Au deposition. Diameter of the pump chamber is 7 mm and the width and depth of the channel are 200 and $180{\mu}m$, respectively. The PDMS layers chip and the heater deposited glass chip are combined by a jig and a clamp for pumping operation, and they are separable so that PDMS chip is used as a disposable but the heater chip is able to be used repeatedly. Pumping performance was simulated by CFD software and investigated experimentally. The performance was the best when the duty ratio of the applied voltage to the heater was 33%.

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참고문헌

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