Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Effect of Nitrogen Gas Pressure on the Property of TiN-Coated Layer of High Speed Steel by Arc ion Plating

AIP 법에서 질소가스 압력이 고속도강의 TiN 코팅층 성질에 미치는 영향

  • 김해지 (진주산업대학교 자동차공학과) ;
  • 전만수 (경상대학교 기계항공공학부)
  • Published : 2008.07.01
Download PDF
⟨ Previous Next ⟩

Abstract

The effect of nitrogen gas pressure in arc ion plating on surface properties of the TiN-coated high speed steel(SKH51) is presented in this paper. The surface roughness, micro-particle, micro-hardness, coated thickness, atomic distribution of TiN, and adhesion strength are measured fur various nitrogen gas pressures. It has been shown that the nitrogen gas pressure has a considerable effect on the surface roughness, adhesion strength, atomic distribution of TiN, and surface deposition of TiN of the high speed steels but that it has little influence on the micro-hardness and coated thickness.

Keywords

References

  1. Lux, B., Haubner, R. and Wohlrab, C., 'Chemically Vapour-Deposited Hard Coatings: Applications and Selection Guidelines,' Int. J. Surface and Coatings Tech., Vol. 38, Issue 2, pp. 267-280, 1989 https://doi.org/10.1016/0257-8972(89)90089-3
  2. Dearnley, P. A., Thompson, V. and Grearson, A. N., 'Machining ferrous materials with carbides coated by chemical vapour deposition I: Interfacial conditions,' Int. J. Surface and Coatings Tech., Vol. 29, Issue 3, pp. 157-177, 1986 https://doi.org/10.1016/0257-8972(86)90011-3
  3. Benmalek, M., Gimenez, P., Peyre, P. and Tournier, C., 'Characterization and Comparison of TiN Layers Deposited by Different Physical Vapour Deposition Processes,' Int. J. Surface and Coatings Tech., Vol. 48, Issue 3, pp. 181-187, 1991 https://doi.org/10.1016/0257-8972(91)90001-D
  4. Fancey, K. S., 'A Coating Thickness Uniformity Model for Physical Vapour Deposition Systems,' Int. J. Surface and Coatings Tech., Vol. 71, Issue 3, pp. 16-29, 1995 https://doi.org/10.1016/0257-8972(94)02298-5
  5. Mattox, D., 'Ion Plating-Past, Present and Future,' Int. J. Surface and Coatings Tech., Vol. 133-134, pp. 517-521, 2000 https://doi.org/10.1016/S0257-8972(00)00922-1
  6. Yoon, S. Y., Lee, Y. B. and Kim, K. H., 'A Comparative Study on Mechanical Properties of TiN and TiAlN Films Prepared by Arc Ion Plating Technique,' J. of the KISE, Vol. 35, No. 4, pp. 199-205, 2002
  7. Matsue, T., Hanabusa, T. and Ikeuchi, Y., 'Dependence to Processing Conditions of Structure in TiN Films Deposited by Arc Ion Plating,' Int. J. of Vacuum, Vol. 74, Issues 3-4, pp. 647-651, 2004 https://doi.org/10.1016/j.vacuum.2004.01.049
  8. Matsue, T., Hanabusa, T. and Ikeuchi, Y., 'The Structure of TiN Films Deposited by Arc Ion Plating,' Int. J. of Vacuum, Vol. 66, Issues 3-4, pp. 435-439, 2002 https://doi.org/10.1016/S0042-207X(02)00167-7
  9. Kim, H. J., Joun, M. S. and Kim, N. K., 'Effect of Furnace Temperature on the Property of TiN-Coated Layer on Hard Metal by Arc Ion Plating,' J. of the KSMT, Vol. 15, No. 1, pp. 49-55. 2006
  10. Kim, H. J., Lee, S. W. and Joun, M. S., 'Experimental Study on Effect of Furnace Temperature on TiN-Coating of High Speed Steel by Arc Ion Plating,' J. of the KSPE, Vol. 23, No. 2, pp. 97-103, 2006
  11. Kang, G. H., Uchida, H. and Koh, E. S., 'A Study on the Surface Structure of Ti Cathode and the Macroparticle of TiN Films Prepared by the Arc Ion Plating Process,' Int. J. of Surface and Coating Tech., Vol. 86-87, pp. 421-424, 1996 https://doi.org/10.1016/S0257-8972(96)02980-5
  12. Kim, S. W., 'Consideration on the Evaulation of Adhesion Force of Thin Film with Rockwell and Scratch Tester,' J. of the KSHT, Vol. 17, No. 6, pp. 365-369, 2004