Tribology and Lubricants

  • 제24권2호
  • /
  • Pages.63-71
  • /
  • 2008
  • /
  • 2713-8011(pISSN)
  • /
  • 2713-802X(eISSN)
한국트라이볼로지학회 (Korean Tribology Society)
권호 표지
DOI QR코드

DOI QR Code

AFM을 이용한 MEMS/NEMS 공정용 재료의 트라이볼로지 특성에 관한 연구

A Study on Tribological Characteristics of Materials for MEMS/NEMS Using Chemically Modified AFM tip

  • 허정철 (한국과학기술원 기계항공시스템학부) ;
  • 김광섭 (한국과학기술원 기계항공시스템학부) ;
  • 김경웅 (한국과학기술원 기계항공시스템학부)
  • Heo, Jung-Chul (School of Mechanical, Aerospace & System Engineering, KAIST) ;
  • Kim, Kwang-Seop (School of Mechanical, Aerospace & System Engineering, KAIST) ;
  • Kim, Kyung-Woong (School of Mechanical, Aerospace & System Engineering, KAIST)
  • 발행 : 2008.04.30
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

Friction and adhesion tests were conducted to investigate tribological characteristics of materials for MEMS/NEMS using atomic force microscope (AFM). AFM Si tips were chemically modified with a self-assembled monolayer (SAM) derived from trichlorosilane like octadecyltrichlorosilane (OTS) and (1H, 1H, 2H, 2H-perfluorooctyl) trichlorosilane (FOTS), and various materials, such as Si, Al, Au, Cu, Ti and PMMA films, were prepared for the tests. SAMs were coated on Si wafer by dipping method prior to AFM tip to determine a proper dipping time. The proper dipping time was determined from the measurements of contact angle, surface energy and thickness of the SAMs. AFM tips were then coated with SAMs by using the same coating condition. Friction and adhesion forces between the AFM Si tip modified with SAM and MEMS/NEMS materials were measured. These forces were compared to those when AFM tip was uncoated. According to the results, after coating OTS and FOTS, the friction and adhesion forces on all materials used in the tests decreased; however, the effect of SAM on the reduction of friction and adhesion forces could be changed according to counterpart materials. OTS was the most effective to reduce the friction and adhesion forces when counterpart material was Cu film. In case of FOTS, friction and adhesion forces decreased the most effectively on Au films.

키워드

참고문헌

  1. Srinivasan, U., Houston, M.R., Howe, R.T. and Maboudian, R., "Alkyltrichlorosilane-based Self-assembled Monolayer Films for Stiction Reduction in Silicon Micromachines," J. Microelectromech. Syst., vol. 7, pp. 252-260, 1998 https://doi.org/10.1109/84.679393
  2. Ding, J.N., Meng, Y.G. and Wen, S.Z., "Theoretical Study on the Sticking of a Membrane Strip in MEMS under the Casimir effect," J. Micromech. Microeng., Vol. 11, pp. 202-208, 2001 https://doi.org/10.1088/0960-1317/11/3/307
  3. Alley, R.L., Cuan, G.J., Howe, R.T. and Komvopoulos, K., "The Effect of Release-etch Processing on Surface Microstructure Stiction," in Proc IEEE Solid-State Sensor and Actuator Wkshp., Hilton Head, SC, June, pp. 202-207, 1992
  4. Deng, K., Colins, R.J., Mehregany, M. and Sukenik, C.N., "Performance Impact of Monolayer Coating of Polisilicon Micromotors," J. Electrochem. Soc., Vol. 142, pp. 1278-1285, 1995 https://doi.org/10.1149/1.2044164
  5. Chen, J.K., Ko, F.H., Hsieh, K.F., Chou, C.T. and Chang, F.C., "Effect of Fluoroalkyl Substitutes on the Reactions of Alkylchlorosilanes with Mold Surfaces for Nanoimprint Lithography," J. Vac. Sci. Technol. B, Vol. 22, No. 6, pp. 3233-3241, 2004 https://doi.org/10.1116/1.1815305
  6. Ulman, A., "Formation and Structure of Self-Assembled Monolayers," Chem. Rev., Vol. 96, pp. 1533-1554, 1996 https://doi.org/10.1021/cr9502357
  7. Ulman, A., 1991, An Introduction to Ultrathin Organic Films : From Langmuir-Blodgett to Self- Assembly; Academic Press : San Diego, CA
  8. Bhushan, B. and Liu, H., "Nanotribological Properties and Mechanisms of Alkylthiol and Biphenyl Thiol Self-assembled Monolayers Studied by AFM," Phys. Rev. B, Vol. 63, pp. 245412-, 2001 https://doi.org/10.1103/PhysRevB.63.245412
  9. Liu, H. and Bhushan, B., "Investigation of Nano Tribological Properties of Self-assembled Monolayers With Alkyl and Biphenyl Spacer Chains (Invited)," Ultramicroscopy, Vol. 91, pp. 185-202, 2002 https://doi.org/10.1016/S0304-3991(02)00099-2
  10. van Oss, C.J., "Interfacial Forces in Aqueous Media," Dekker, New York, 1994
  11. Le Grange, J.D. and Marlham, J.L., "Effects of Surface Hydration on the Deposition of Silane Monolayers on Silica," Langmuir, Vol. 9, pp. 1749-1753, 1993 https://doi.org/10.1021/la00031a023
  12. McGovern, Mark E., Kallury, Krishna M. and Thompson, Michael, "Role of Solvent on the Silanization of Glass with Octadecyl Trichlorosilane," Langmuir, Vol. 10, pp. 3607-3614, 1994 https://doi.org/10.1021/la00022a038
  13. Silberzan, P., Leger, L., Ausserre, D. and Benattar, J.J., "Silanation of Silica Surfaces. A New Method of Constructing Pure or Mixed Monolayers," Langmuir, Vol. 7, pp. 1647-1651, 1991 https://doi.org/10.1021/la00056a017
  14. Hjalti Skulason and C.Daniel Frisbie, "Rupture of Hydrophobic Microcontacts in Water: Correlation of Pull-off Force with AFM Tip Radius," Langmuir, Vol. 16, pp. 6294-6297, 2000 https://doi.org/10.1021/la000208y
  15. Hyo-Sok Ahn, Pham Duc Cuong, Sangkwon Park, Yong-Wook Kim and Jong-Choo Lim, "Effect of Molecular Structure of Self-assembled Monolayers on their Tribological Behaviors in Nano- and Microscales," Wear, Vol. 255, pp. 819-825, 2003 https://doi.org/10.1016/S0043-1648(03)00192-3
  16. Vladimir V. Tsukrik and Valery N. Bliznyuk, "Adhesive and Friction Forces between Chemically Modified Silicon and Silicon Nitride Surfaces," Langmuir, Vol. 14, pp. 446-455, 1998 https://doi.org/10.1021/la970367q
  17. Takashi Ito, Madoka Nambe, Philippe Buhlmann and Yoshio Umezawa, "Modification of Silicon Nitride Tips with Trichlorosilane Self-assembled Monolayers( SAMs) for Chemical Force Microscopy," Langmuir, Vol. 13, pp. 4323-4332, 1997 https://doi.org/10.1021/la9609783
  18. J. Tallal, M. Gordon, K. Berton, A.L. Charley and D. Peyrade, "AFM Characterization of Anti-sticting Layers Used in Nanoimprint," Microelectronic Engineering, Vol. 83, pp. 851-854, 2006 https://doi.org/10.1016/j.mee.2006.01.011
  19. Jeong Ho Cho, Dae Ho Lee, Jung Ah Lim and Kilwon Cho, "Evaluation of the Adhesion Properties of Inorganic Materials with High Surface Energies," Langmuir, Vol. 20, pp. 10174-10178, 2004 https://doi.org/10.1021/la048403q
  20. Mark.E.McGovern, Krishna M.R.Kallury and Michael Thompson, "Role of Solvent on the Silanixation of Glass with Octadecyl Trichlorosilane," Langmuir, Vol. 10, pp. 3607-3514, 1994 https://doi.org/10.1021/la00022a038
  21. J.B.Brozska, I.Ben Azouz and F.Rondelez, "Silanization of Solid Substrates : A Step Toward Reproducibility," Langmuir, Vol. 10, pp. 4367-4373, 1994 https://doi.org/10.1021/la00023a072
  22. Jack E. Houston, Christopher M Doelling, Kyle Vanderlick, Ying Hu, Giacinto Scoles, Irmgard Wenzl and T. Randall Lee, "Comparative Study of the Adhesion, Friction, and Mechanical Properties of $CF_{3-}$ and $CH_{3-}$ Terminated Alkanethiol Monolayers," Langmuir, Vol. 21, pp. 3926-3932, 2005 https://doi.org/10.1021/la046901t