Structural Engineering and Mechanics

  • 제29권5호
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  • Pages.581-597
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  • 2008
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  • 1225-4568(pISSN)
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  • 1598-6217(eISSN)
테크노프레스 (Techno-Press)
권호 표지
DOI QR코드

DOI QR Code

Double displacement coupled forced response for electromechanical integrated electrostatic harmonic drive

  • Xu, Lizhong (Mechanical engineering institute, Yanshan University) ;
  • Zhu, Cuirong (Mechanical engineering institute, Yanshan University) ;
  • Qin, Lei (Mechanical engineering institute, Yanshan University)
  • 투고 : 2007.11.10
  • 심사 : 2008.03.20
  • 발행 : 2008.07.30
⟨ 이전 논문 다음 논문 ⟩

초록

In this paper, the double displacement coupled statics and dynamics of the electromechanical integrated electrostatic harmonic drive are developed. The linearization of the nonlinear dynamic equations is completed. Based on natural frequency and mode function, the double displacement coupled forced response of the drive system to voltage excitation are obtained. Changes of the forced response along with the system parameters are investigated. The voltage excitation can cause the radial and tangent coupled forced responses of the flexible ring. The flexible ring radius, ring thickness and clearance between the ring and stator have obvious influences on the double displacement coupled forced responses.

키워드

참고문헌

  1. Bao, Z.P. and Mukherjee, S. (2004), 'Electrostatic BEM for MEMS with thin conducting plates and shells', Eng. Anal. Bound. Elem., 28, 1427-1435 https://doi.org/10.1016/j.enganabound.2004.07.001
  2. Giuseppe, M. (2007), 'Design and demonstrators testing of adaptive airfoils and hingeless wings actuated by shape memory alloy wires', Smart Struct. Syst., 3(1), 89-114 https://doi.org/10.12989/sss.2007.3.1.089
  3. Lizhong, Xu. and Xiuhong, Hao. (2007), 'Dynamic response for electromechanical integrated toroidal drive to electric excitation', Struct. Eng. Mech., 26(6), 635-650 https://doi.org/10.12989/sem.2007.26.6.635
  4. Nadal-Guardia, R., Brosa, A.M. and Dehe, A. (2003), 'AC transfer function of electrostatic capacitive sensors based on the 1-D equivalent model: application to silicon microphones', J. Microelectromech. S., 12(6), 972-978 https://doi.org/10.1109/JMEMS.2003.820290
  5. Oliver, B. (2000), 'Harmonic piezodrive-miniaturized servo motor', Mechatronics, 10, 545-554 https://doi.org/10.1016/S0957-4158(99)00062-8
  6. Sarros, T., Chew, E.C., Crase, T.S., Tay, B.K. and Soong, W.L. (2002), 'Investigation of cylindrical and conical electrostatic wobble micromotors', Microelectronics, 33, 129-140 https://doi.org/10.1016/S0026-2692(01)00112-4
  7. Thielicke, E. and Obermeier, E. (2000), 'Microactuators and their technologies', Mechatronics, 10, 431-455 https://doi.org/10.1016/S0957-4158(99)00063-X
  8. Wu, X.S., Chen, W.Y. and Zhao, X.L. (2006), 'Development of a micromachined rotating gyroscope with electromagnetically levitated rotor', J. Micromech. Microeng., 16(10), 1993-1999 https://doi.org/10.1088/0960-1317/16/10/011
  9. Xu, L., Qin, L. and Zhu, C. (2007), 'Electromechanical integrated electrostatic harmonic actuator', Proceedings of the Institution of Mechanical Engineers, Part I: Journal of Systems and Control Engineering, 221(3), 487-495