References
- Chou, S. and Krauss, P., 1997, "Imprint lithography with sub-10nm feature size and high throughput," Microelectronic Engineering, Vol. 35, pp. 237-240 https://doi.org/10.1016/S0167-9317(96)00097-4
- Guo, L. J., 2004, "Recent progess in nanoimprint technology and its applications," Journal of Physics D: Applied Physics, Vol. 37, pp. R123-R141 https://doi.org/10.1088/0022-3727/37/11/R01
- Lee, K., Lee, M., Lee, J., Lim, S., Shin, D., J, S., Jeong, J., and Yim, H., 2007, "Dynamic Analysis of a Nano Imprinting Stage Using CAE," Transactions of the Korean Society of Machine Tool Engineers, Vol. 16, No. 5, pp. 211-217
- Hirai, Y., Fujiwara, M., Okuno, T., and Tanaka, Y., 2001, "Study of the resist deformation in nanoimprint lithography," Journal of Vacuum Science and Technology B, Vol. 19, No. 6, pp. 2811-2815 https://doi.org/10.1116/1.1415510
- Hirai, Y., Konishi, T., Yoshikawa, T., and Yoshida, S., 2004, "Simulation and experimental study of polymer deformation in nanoimprint lithography," Journal of Vacuum Science and Technology B, Vol. 22, No. 6, pp. 3288-3293 https://doi.org/10.1116/1.1826058
- H. Hocheng and C. C. Nien, 2006, "Numerical analysis of effects of mold features and contact friction on cavity filling in the nanoimprint lithography," Journal of Microlithography Microfabrication and Microsystems, Vol. 5, No. 1, 011004-1 https://doi.org/10.1117/1.2177286
- Young, W. B., 2005, "Analysis of the nanoimprint lithography with a viscous model," Microelectronic Engineering, Vol. 77, pp. 405-411 https://doi.org/10.1016/j.mee.2005.01.024
- Heyderman, L. J., Schift, H., David, C., Gobrecht, J., and Schweizer, T., 2000, "Flow behaviour of thin polymer films used for hot embossing lithography," Microelectronic Engineering, Vol. 54, pp. 229-245 https://doi.org/10.1016/S0167-9317(00)00414-7
- Jeong, J. H., Choi, Y. S., Shin, Y. J., Lee, J. J., and Park, K. T., 2002, "Flow behavior at the embossing stage of nanoimprint lithography," Fibers and Polymers, Vol. 3, No. 3, pp. 113-110 https://doi.org/10.1007/BF02892627