한국결정성장학회지 (Journal of the Korean Crystal Growth and Crystal Technology)

  • 제18권2호
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  • Pages.72-75
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  • 2008
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  • 1225-1429(pISSN)
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  • 2234-5078(eISSN)
한국결정성장학회 (The Korea Association of Crystal Growth)
권호 표지

Effect of heat-treatment on the structural and electrical properties of ZnO thin films by the sol-gel method

  • Lee, Seung-Yup (Department of Inorganic Materials Engineering, Kyungpook National University) ;
  • Park, Byung-Ok (Department of Inorganic Materials Engineering, Kyungpook National University)
  • 발행 : 2008.04.30
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초록

Zinc oxide (ZnO) thin films were prepared by a sol-gel method. The structural and electrical properties were investigated by varying drying and annealing temperatures. The thin films were coated (250 nm) by spin-coating method on glass substrates. The optimum drying temperature of ZnO thin films was 300$^{\circ}C$ where the resistivity was the lowest and the preferred c-axis orientation was the highest. The annealing was carried out in air and inert atmospheric conditions. The degree of the preferred c-axis orientation was estimated. The highest preferred c-axis orientation was recorded at 600$^{\circ}C$. The preferred c-axis orientation and grain growth resulted in the mobility enhancement of the ZnO thin films, and the lowest resistivity was 0.62${\Omega}{\cdot}cm$ at 600$^{\circ}C$.

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