반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)
- 제7권3호
- /
- Pages.1-4
- /
- 2008
- /
- 1738-2270(pISSN)
Generation of Si-O-C Bond without Si-$CH_3$ Bond in Hybrid Type SiOC Film
- Oh, Teresa (School of Electronic and Information Engineering, Cheongju University)
- 발행 : 2008.09.30
초록
The chemical shift of SiOC film was observed according to the flow rate ratio. SiOC film had the broad main band of