Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)
- Volume 7 Issue 4
- /
- Pages.23-28
- /
- 2008
- /
- 1738-2270(pISSN)
Mechanism Design of High Speed Automated Pitch Variation Unit by using 6-Sigma Method
6-시그마 기법을 이용한 고속자동피치가변장치 메커니즘 설계
- Lee, Jin-Hwan (SECRON Co., LTD) ;
- Won, Yun-Jae (School of Mechatronics Engineering, Korea University of Technology and Education) ;
- Lee, Hyuk (SECRON Co., LTD)
- Published : 2008.12.30
Abstract
A high speed automated pitch variation unit (HAPU) related to semiconductor category sorting movement of the test handler system was developed. In the design process, 'DMADOV' step of 6-Sigma method has been applied. The design result for the desirable pitch variation was a 3:1 reduction rack-pinion and a linkage which are operated by servomotors. The realization and reliability of the mechanism was obtained at the design stage by FEM analysis, and by robust design using Taguchi orthogonal array against weight and deformation. Finally, the validity of the high speed variation mechanism was confirmed via inspection using a high speed camera while performing pitch variation.