Journal of Institute of Control, Robotics and Systems (제어로봇시스템학회논문지)

Institute of Control, Robotics and Systems (제어로봇시스템학회)
권호 표지
DOI QR코드

DOI QR Code

Development of Fabrication Process of Light Guiding Plate with Nanometer-Sized-Cylindrical Pattern Using Nano Imprint Lithography Method

나노 임프린트 리소그래피법에 의한 나노미터급 원기둥 패턴을 갖는 도광판의 제작 공정 개발

  • 이병욱 (순천향대학교 전자정보공학과) ;
  • 홍진수 (순천향대학교 전자물리학과) ;
  • 김창교 (순천향대학교 전자정보공학과)
  • Published : 2008.04.01
Download PDF
⟨ Previous Next ⟩

Abstract

PMMA light guiding plate with nano pattern was fabricated by nano imprint lithography method. A silicon mold for electroplating of nickel was fabricated by conventional photolithography process. A nickel stamp for nano imprint lithography was fabricated by electroplating process using silicon mold. The nano imprint lithography was performed on PMMA plate at $140^{\circ}C$ under pressure of 20kN. The nano pattern on PMMA plate was investigated using FE-SEM. It is shown that the patterns were well transferred for several steps and the nano imprint lithography method could be applied for fabricating patterns of light guiding plate.

Keywords

References

  1. 호서대학교 디스플레이기술교육센터, "TFT-LCD 전문교육," 2003
  2. 특허청, "2000년 신기술 동향 조사보고서(백라이트 부분의 저소비 전력화)," 2000
  3. 황철진, 김종덕, 허영무, 하수용, 이규현, "LIGA-reflow 마이크로렌즈 패턴 금형 가공 및 LCD BLU 개발," 기계기술, pp. 164-168, 2004
  4. Z. Xu, L. Cao, Q. Tan, Q. He, and G. Jin, "Enhancement of the light output of light-emitting diode with double photonic crystals," Optics Communications, vol. 278, pp. 211-214, 2007 https://doi.org/10.1016/j.optcom.2007.06.019
  5. 홍진수, 김창교, "면광원용 도광판," 대한민국 특허 출원 번호 10-2007-61507, 2007
  6. 홍진수, 김창교, "도광판 및 그 제조방법," 대한민국 특허 출원번호 10-2007-61506, 2007
  7. S. Y. Chou et al., "Imprint of sub-25 nm vias and trenches in polymers," Applied Physics Letter, vol. 67, pp. 3114-3116, 1995 https://doi.org/10.1063/1.114851
  8. 이희철, "나노 임프린트 공정 기술의 디스플레이 응용 연구 현황 및 전망," 한국정보디스플레이학회지, vol. 8, no. 6, 2007
  9. W. J. Dauksher, N. V. Le, E. S. Ainley, K. J. Nordquist, K. A. Gehoski, S. R. Young, J. H. Baker, D. Convey, and P. S. Mangat, "Nano-imprint lithography: Templates, imprinting and wafer pattern transfer," Microelectronic Engineering, vol. 83, pp. 929-932, 2006 https://doi.org/10.1016/j.mee.2006.01.075
  10. A. Qualtieri, T. Stomeo, S. Lattante, M. Anni, L. Martiradonna, and M. De Vittorio, "Fabrication of disordered photonic crystal structures for organic random lasing devices," Microelectronic Engineering, vol. 84, pp. 1581-1584, 2007 https://doi.org/10.1016/j.mee.2007.01.097