Abstract
For the measurement of the magnetic field distribution with high spatial resolution and high accuracy, the magnetic field sensing probe must be non-magnetic, but the MFM probe and sub-millimeter-meter size Hall probe use a ferromagnetic tip and block, respectively, to increase the sensitivity. To overcome this drawback, we developed a micro-size search coil magnetometer which consists of a single turn search coil, Terfenol-D actuator, scanning system, and control software. To reduce the noise generated by the stray ac magnetic field of the actuator driving coil, we employed an even function $\lambda$-H magnetostriction curve and lock-in technique. Using the developed magnetometer, we were able to measure the magnetic field distribution with a magnetic field resolution of 1 mT and spatial resolution of $0.1mm{\times}0.2mm$ at a coil vibration frequency of 1.8 kHz.