고체침지렌즈 기반 근접장 표면 기록을 위한 고체침지렌즈 광학 헤드의 조립 및 평가에 대한 연구

A Study on Assembly and Evaluation of SIL optical Head for surface Recording of SIL based NFR

  • 민철기 (연세대학교 기계공학과 대학원) ;
  • 김태섭 (연세대학교 정보저장공학 협동과정) ;
  • 윤용중 (연세대학교 정보저장공학 협동과정) ;
  • 박노철 (연세대학교 기계공학과) ;
  • 박영필 (연세대학교 기계공학과 대학원)
  • 발행 : 2008.03.01

초록

For the assembly and evaluation of solid immersion lens (SIL) optical head which is the key component of SIL based near field recording (NFR) technology, we modify the Twyman-Green interferometer. Super-hemisphere SIL optical head for the surface recording is assembled and evaluated by the modified Twyman-Green interferometer. In order to verify the optical performance of the assembled SIL optical head, we compare the measured results of the SIL optical head with the simulation ones. Finally, we show the feasibility of applying the assembled SIL optical head to near field recording system by the experiment of the dynamic gap control based on test bed.

키워드