참고문헌
- Li, B. G., Xiong, C. Y. and Li, C. G., "Machining Technology of Super Smooth Surface," Manufacturing Technology & Machine Tools, No. 6, pp. 60-66, 2006
- Alagumurthi, N., Palaniradja, K. and Soundararajan, V., "Cylindrical Grinding - A Review on Surface Integrity," International Journal of Precision Engineering and Manufacturing, Vol. 8, No. 3, pp. 24-44, 2007
- Zhang, H., Wang, W. and Pang, Y. Y., "Ultra-precision Machining Technology of Optical Surfaces," Optical Instruments, Vol. 25, No. 3, pp. 47-51, 2003
- Zhao, G. X., Li, Y. and Zheng, Y. N., "Discussion on the Principle of Ion Beam Removal Machining," EDM and Mould, Vol. 1, pp. 26-28, 2001
- Detrick, M. S., Washington, G. N. and Subramaniam, V. V., "Control of Polishing of Diamond Films Using Microactuation and an Atmospheric Pressure Plasma," IEEE/ASME Transactions on Mechatronics, Vol. 8, No. 1, p. 45, 2003 https://doi.org/10.1109/TMECH.2003.809151
- Carr, J. W., "Atmospheric Pressure Plasma Processing for Damage-free Optics and Surfaces," Engineering Research Development and Technology, Vol. 3, pp. 3-1-3-9, 1999
- Mori, Y., Yamamura, K. and Endo, K., "Creations of Perfect Surfaces," Journal of Crystal Growth, Vol. 275, pp. 39-50, 2005 https://doi.org/10.1016/j.jcrysgro.2004.10.097
- Mori, Y., Yamauchi, K., Yamamura, K. and Sano, Y., "Development of Plasma Chemical Vaporization Machining," Review of Scientific Instruments, Vol. 71, No. 12, pp. 4627-4632, 2000 https://doi.org/10.1063/1.1322581
- Yamamura, K., Kato, K., Sano, Y., Shibahara, M., Endo, K. and Mori, Y., "High-Spatial-Resolution Machining Utilizing Atmospheric Pressure Plasma: Machining Characteristics of Silicon," Japanese Journal of Applied Physics,Vol. 45, No. 10, pp. 8281-8285, 2006 https://doi.org/10.1143/JJAP.45.8281
- Wang, B., Zhao, Q. L., Wang, L. P. and Dong, S., "Application of Atmospheric Pressure Plasma in the Ultrasmooth Polishing of SiC Optics," Materials Science Forum, Vol. 532-533, pp. 504-507, 2006 https://doi.org/10.4028/www.scientific.net/MSF.532-533.504
- Zhang, J. F., Wang, B. and Dong, S., "The Design of an Atmospheric Pressure Plasma Torch Used for Polishing Ultra-Smooth Surfaces," Key Engineering Materials, Vol. 364-366, pp. 340-345, 2008 https://doi.org/10.4028/www.scientific.net/KEM.364-366.340
- Dean, J. A., "Analytical Chemistry Handbook," Science Press, p. 7.1, 2003
- Ke, Y. K. and Dong, H. R, "Analytical Chemistry Manual (III): Spectral Analysis," Journal of Crystal Growth, Vol. 275, pp. 39-50, 2005 https://doi.org/10.1016/j.jcrysgro.2004.10.097
- Information on http://physics.nist.gov
- Jeong, H. C., Choi, G. M. and Kim, D. J., "The Precision of Lead Frame Etching Characteristics Using Monte-Carlo Simulations," International Journal of Precision Engineering and Manufacturing, Vol. 8, No. 1, pp. 73-78, 2007
- Carter, L. E. and Carter, E. A., "F2 Reaction Dynamics with Defective Si (100): Defect-insensitive Surface Chemistry," Surface Science, Vol. 323, pp. 39-50, 1995 https://doi.org/10.1016/0039-6028(94)00622-9
- Shibahara, M. and Katsuki, M., "Molecular Dynamics Study of the Effects of Adsorbed Molecules on Reaction Probability and Energy Transfer," Combustion and Flame, Vol. 144, pp. 17-23, 2006 https://doi.org/10.1016/j.combustflame.2005.06.012
- Asai, T., Motoki, T., Gao, W., Ju, B. F. and Kiyono, S., "An AFM-based Edge Profile Measuring Instrument for Diamond Cutting Tools," International Journal of Precision Engineering and Manufacturing, Vol. 8, No. 2, pp. 54-58, 2007