Journal of Korean Institute of Industrial Engineers (대한산업공학회지)

Korean Institute of Industrial Engineers (대한산업공학회)
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A Real Time Integrated Dispatching Logic for Semiconductor Material Flow Control Considering Multi-load Automated Material Handling System

반도체 물류 제어 시스템을 위한 반송장비의 다중적재를 고려한 실시간 통합 디스패칭 로직

  • Suh, Jungdae (Department of Industrial Engineering, Kyungwon University) ;
  • Faaland, Bruce (School of Business, University of Washington)
  • 서정대 (경원대학교 산업정보시스템공학과) ;
  • Received : 2007.06.20
  • Accepted : 2008.04.18
  • Published : 2008.09.30
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Abstract

A semiconductor production system has sophisticated manufacturing operations and needs high capital investment for its expensive equipment, which warrants efficient real-time flow control for wafers. In the bay, we consider material handling equipment that can handle multiple carriers of wafers. The dispatching logic first determines the transportation time of each carrier to its destination by each unit of transportation equipment and uses this information to determine the destination machine and target carrier. When there is no available buffer space at the machine tool, the logic allows carriers to stay at the buffer of a machine tool and determine the delay time, which is used to determine the destination of carriers in URL. A simulation study shows this dispatching logic performs better than the procedure currently in use to reduce the mean flow time and average WIP of wafers and increase efficiency of material handling equipment.

Keywords

Acknowledgement

Supported by : LG연암문화재단

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