References
- Okazaki, Y., Mishima, N. and Ashida, K., 'Microfactory-Concept, History, and Developments,' Journal of Manufacturing Science and Engineering, Vol. 126, Issue 4, pp. 837-844, 2004 https://doi.org/10.1115/1.1823491
- Vogler, M. P., Liu, X., Kapoor, S. G., DeVor, R. E. and Ehmann, K. F., 'Development of Meso Scale Machine Tool (mMT) Systems,' Transactions of NAMRI/SME, Vol. 30, pp. 653-661, 2002
- Smith, S. T. and Seugling, R. M., 'Sensor and Actuator Considerations for Precision, Small Machines,' Precision Engineering, Vol. 30, Issue 3, pp. 245-264, 2006 https://doi.org/10.1016/j.precisioneng.2005.10.003
- Hwang, J. H., Park, C. H. and Kim, S. W., 'Estimation of 2D Position and Flatness Errors for a Planar XY Stage Based on Measured Guideway Profiles,' International Journal of Precision Engineering and Manufacturing, Vol. 8, No. 2, pp. 64-69, 2007
- Ro, S. K., Kim, S. H., Kwak, Y. G. and Park, C. H., 'Linear Air Bearing Stage with Actively Controllable Magnetic Preload,' Conference Proceedings of EUSPEN, pp. 297-300, 2006
- Ro, S. K., Park, J. K., Yoon, H. S. and Ehmann, K. F., 'Static and Dynamic Characteristics of Magnetically Preloaded Stages for a 3-Axis Micro-Machine Tool,' Proceedings of the KSMTE Spring Conference, pp. 468-472, 2005
- Fukada, S. and Nishimura, K., 'Nanometric Positioning Over a One-Millimeter Stroke Using a Flexure Guide and Electromagnetic Linear Motor,' International Journal of Precision Engineering and Manufacturing, Vol. 8, No. 2, pp. 49-53, 2007
- Fourka, M. and Bonis, M., 'Comparison between Externally Pressurized Gas Thrust Bearings with Different Orifice and Porous Feeding System,' Wear, Vol. 210, Issue 2, pp. 311-317, 1997 https://doi.org/10.1016/S0043-1648(97)00079-3
- Yoshimoto, S. and Kohno, K., 'Static and Dynamic Characteristics of Aerostatic Circular Porous Thrust Bearings (Effect of the Shape of the Air Supply Area),' ASME Journal of Tribology, Vol. 123, Issue 3, pp. 501-508, 2001 https://doi.org/10.1115/1.1308027
- Slocum, A., Basaran, M., Cortesi, R. and Hart, A. J., 'Linear Motion Carriage with Aerostatic Bearings Preloaded Inclined Iron Core Linear Electric Motor,' Precision Engineering, Vol. 27, Issue 4, pp. 382-394, 2003 https://doi.org/10.1016/S0141-6359(03)00037-0
- Park, C. H. and Lee, H., 'Motion Error Analysis of the Porous Air Bearing Stage Using the Transfer Function,' Journal of Korean Society for Precision Engineering, Vol. 21, No. 7, pp. 185-194, 2004
- Filho, A. F. F., Susin, A. A. and da Silveria, M. A., 'An Analytical Method of Predicting the Static Performance of a Planar Actuator,' IEEE Transactions on Magnetics, Vol. 39, No. 5, pp. 3364-3366, 2003 https://doi.org/10.1109/TMAG.2003.816258
- Basak, A. and Anayi, F. J., 'A DC Linear Motor with a Square Amarture,' IEEE Transactions on Energy Conversion, Vol. 10, No. 3, pp. 462-469, 1995 https://doi.org/10.1109/60.464869
- Basak, A., Filho, A. F. F., Nakata, T. and Takahasi, N., 'Three-dimensional Computation of Force in a Novel Brushless DC Linear Motor,' IEEE Transactions on Magnetics, Vol. 33, No. 2, pp. 2030-2032, 1997 https://doi.org/10.1109/20.582708
- Furlani, E. P., 'Permanent Magnet and Electro-mechanical Devices: Materials, Analysis and Applications,' Academic Press, 2001
- Lee, S. H., Baek, Y. S. and Jung, K. S., 'Modeling and Analyzing Electromagnets for Magnetic Suspension Systems', International Journal of Precision Engineering and Manufacturing, Vol. 7, No. 4, pp. 28-33, 2006
- Fitzgerald, A. E., Kingsly, C., Jr. and Umans, S. D., Electric Machinery, McGraw-Hill, 1992