Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Fabrication of High Ordered Nano-sphere Array on Curved Substrate by Nanoimprint Lithography

나노임프린트 리소그래피를 이용한 곡면 기판 위에 정렬된 나노 볼 패턴 형성에 관한 연구

  • Hong, S.H. (Department of Materials Science and Engineering, Korea University) ;
  • Bae, B.J. (Department of Materials Science and Engineering, Korea University) ;
  • Kwak, S.U. (RND center, Kornic System Co.) ;
  • Lee, H. (Department of Materials Science and Engineering, Korea University)
  • 홍성훈 (고려대학교 신소재공학과) ;
  • 배병주 (고려대학교 신소재공학과) ;
  • 곽신웅 (코닉시스템(주)) ;
  • 이헌 (고려대학교 신소재공학과)
  • Published : 2008.12.31
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Abstract

The replica of highly ordered nano-sphere array patterns were fabricated using hot embossing method. First, silica nano-sphere array on Si substrate was transferred to PVC film at $130^{\circ}C$ and 7 bar using hot embossing process. Then, silica nano-sphere array on PVC template was removed by soaking the PVC film in buffered oxide etcher. In order to form anti-stiction layer, the PVC template was coated with silicon dioxide layer and self-assembled monolayer. Through UV nanoimprint lithography with the fabricated flexible PVC template, highly ordered nano-sphere array pattern was imprinted on curved substrates with high fidelity.

Keywords

References

  1. J. M. Weissman, H. B. Sunkara, A. S. Tse, S. A. Asher, Science 274 (1996) 959 https://doi.org/10.1126/science.274.5289.959
  2. S. H. Park, Y. Xia, Langmuir, 15 (1999) 266 https://doi.org/10.1021/la980658e
  3. S. H. Sun, C. B. Murray, D. Weller, L. Folks, A. Moser, Science, 287 (2000) 1989 https://doi.org/10.1126/science.287.5460.1989
  4. N. D. Denkov, O. D. Velev, P. A. Kralchevsky, I. B. Ivanov, H. Yoshimura, K. Nagayama, Nature, 361 (1993) 26
  5. H. Miguez, F. Meseguer, C. Lopez, A. Blanco, J. S. Moya, J. Requena, A. Mifsud, V. Fornes, Adv. Mater., 10 (1989) 480 https://doi.org/10.1002/(SICI)1521-4095(199804)10:6<480::AID-ADMA480>3.0.CO;2-Y
  6. P. R. Krauss, S. Y. Chou, Appl. Phys. Lett., 71 (1997) 3174 https://doi.org/10.1063/1.120280
  7. S.-H. Hong, K.-S. Han, K.-J. Byeon, H. Lee, K.-W. Choi, Jpn. J. Appl. Phys., 47 (2008) 3699 https://doi.org/10.1143/JJAP.47.3699
  8. S.-H. Hong, K.-S. Han, H. Lee, J. U. Cho, Y. K. Kim, J. Appl. Phys., 46 (2008) 6375
  9. S.-H. Hong, B.-J. Bae, J.-Y. Hwang, S.-Y. Hwang, H. Lee, Microelectron. Eng. submitted

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