Bulletin of the Korean Chemical Society

Korean Chemical Society (대한화학회)
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The Strategy to Fabricate the MTiO3(M = Sr, Ba) Thin Films by Laser Ablation

  • Im, T.M. (Department of Chemistry, Wonkwang University) ;
  • Park, J.Y. (Department of Chemistry, Wonkwang University) ;
  • Kim, H.J. (Department of Chemistry, Wonkwang University) ;
  • Choi, H.K. (Department of Chemistry, Wonkwang University) ;
  • Jung, K.W. (Department of Chemistry, Wonkwang University) ;
  • Jung, D. (Department of Chemistry, Wonkwang University)
  • Published : 2008.02.20
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Abstract

BaTiO3 and SrTiO3 thin films were fabricated on Pt/Ti/SiO2/Si substrate by the pulsed laser deposition process. The dependence of the deposited film quality upon the partial oxygen pressure during the deposition process was importantly examined. Regardless of the oxygen pressure, the as-deposited films were not fully crystallized. However, the film deposited at low oxygen pressure became well crystallized after the annealing process. It was concluded, therefore, that the partial oxygen pressure is reduced as low as possible during the deposition process and then anneal the as-deposited samples at ambient pressure to fabricate the well crystallized SrTiO3 and BaTiO3 films by laser ablation.

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References

  1. Gong, J.; Kawasaki, M.; Fujito, K.; Tanaka, U.; Ishizawa, N.; Yoshimoto, M.; Koinuma, H.; Kumagai, M. Jpn. J. Appl. Phys. 1993, 32, L687 https://doi.org/10.1143/JJAP.32.L687
  2. Norton, M. G.; Cracknell, K. P. B.; Carter, C. B. J. Am. Ceram. Soc. 1992, 75, 1998
  3. Zhang, J.; Chen, Z. H.; Cui, D. F.; Lu, H. B.; Zhou, Y. L.; Li, L.; Yang, G. Z.; Jiang, N.; Hao, J. M. Appl. Phys. Lett. 1995, 66, 2069 https://doi.org/10.1063/1.113905
  4. Lee, M. B.; Kawasaki, M.; Yoshimoto, M.; Koinuma, H. Appl. Phys. Lett. 1995, 66, 1331 https://doi.org/10.1063/1.113232
  5. Pulsed Laser Deposition of Thin Film; Chrisey, D. B.; Hubler, G. K., Eds.; Wiley: 1994
  6. Davis, M. F.; Grower, M. C. Appl. Phys. Lett. 1989, 55, 112 https://doi.org/10.1063/1.102393
  7. Chrisey, D. B.; Horwitz, J. S.; Grabowski, K. S. Mater Res. Soc. Symp. Proc. 1990, 191, 25
  8. Saenger, K. L.; Roy, R. A.; Beach, D. B.; Etzold, K. F. Mater Res. Soc. Symp. Proc. 1993, 285, 421
  9. Okada, T.; Nakata, Y.; Haibara, H.; Maeda, M. Jpn. J. Appl. Phys. 1995, 11B, 1536
  10. Mustofa, S.; Araki, T.; Furusawa, T.; Nishida, M.; Hino, T. Mater. Sci. Eng. 2003, B103, 128
  11. Nakata, Y.; Soumagne, G.; Okada, T.; Maeda, M. Appl. Surf. Sci. 1998, 127-129, 650 https://doi.org/10.1016/S0169-4332(97)00720-4
  12. Millon, E.; Perriere, J.; Defourneau, R. M.; Defourneau, D.; Albert, O.; Etchepare, J. Appl. Phys. Lett. 2003, A77, 73
  13. Lu, H. A.; Willis, L. A.; Wessels, B. W.; Lin, W. P.; Zhang, P. G.; Wong, G. K.; Neumayer, D. A.; Marks, T. J. Appl. Phys. Lett. 1993, 62, 1314 https://doi.org/10.1063/1.108716
  14. Bihari, B.; Kumar, J.; Stauf, G. T.; Van Buskirk, P. C.; Hwang, C. S. J. Appl. Phys. 1994, 76, 1169 https://doi.org/10.1063/1.357841
  15. Lee, M. N.; Park, Y. C. Bull. Korean Chem. Soc. 1995, 16, 908
  16. Tabata, H. Top Appl. Phys. 2005, 98, 161 https://doi.org/10.1007/978-3-540-31479-0_9
  17. Tsurumi, T.; Ichikawa, T.; Harigai, T.; Kakemoto, H.; Wada, S. J. Appl. Phys. 2002, 91, 2284 https://doi.org/10.1063/1.1433180
  18. Kim, J.; Kim, Y.; Kim, Y. S.; Lee, J.; Kim, L.; Jung, D. Appl. Phys. Lett. 2002, 80, 3581 https://doi.org/10.1063/1.1477934
  19. Kim, J. D.; Choi, K. S.; Yang, Y. S.; Jung, D. Bull. Korean Chem. Soc. 2005, 26, 165 https://doi.org/10.5012/bkcs.2005.26.1.165
  20. Kim, T. U.; Kim, B. R.; Lee, W. J.; Moon, J. H.; Lee, B. T.; Kim, J. H. J. Cryst. Growth 2006, 289, 540 https://doi.org/10.1016/j.jcrysgro.2005.11.119
  21. Kim, D. H.; Kwok, H. S. Appl. Phys. Lett. 1995, 67, 1803 https://doi.org/10.1063/1.115064
  22. Zhang, J.; Cui, D. F.; Zhou, Y.; Li, L.; Chen, Z. H.; Szabadi, M.; Hess, P. Thin Solid Films 1996, 287, 101 https://doi.org/10.1016/S0040-6090(96)08736-6
  23. Ferroelectric Film Devices; Francombe, M. H., Taylor, D. J., Eds.; Academic Press: 2000; vol. 5

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