Journal of the Optical Society of Korea

  • 제12권4호
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  • Pages.281-287
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  • 2008
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  • 1226-4776(pISSN)
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  • 2093-6885(eISSN)
한국광학회 (Optical Society of Korea)
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3-D Surface Profile Measurement Using An Acousto-optic Tunable Filter Based Spectral Phase Shifting Technique

  • Kim, Dae-Suk (Division of Mechanical System Engineering, Chonbuk National University) ;
  • Cho, Yong-Jai (Division of Advanced Technology, Korea Research Institute of Standards and Science)
  • 투고 : 2008.09.30
  • 심사 : 2008.12.10
  • 발행 : 2008.12.31
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초록

An acousto-optic tunable filter based 3-D micro surface profile measurement using an equally spaced 5 spectral phase shifting is described. The 5-bucket spectral phase shifting method is compared with a Fourier-transform method in the spectral domain. It can provide a fast measurement capability while maintaining high accuracy since it needs only 5 pieces of spectrally phase shifted imaging data and a simple calculation in comparison with the Fourier transform method that requires full wavelength scanning data and relatively complicated computation. The 3-D profile data of micro objects can be obtained in a few seconds with an accuracy of ${\sim}10nm$. The 3-D profile method also has an inherent benefit in terms of being speckle-free in measuring diffuse micro objects by employing an incoherent light source. Those simplicity and practical applicability is expected to have diverse applications in 3-D micro profilometry such as semiconductors and micro-biology.

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