Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
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XPS study of NiO Growth on Ag(100)

Ag(001)에 성장된 NiO 극초박막의 화학 결함 연구

  • Yang, Seol-Un (Division of Natural Science, Sookmyung Women's University) ;
  • Seong, Shi-Jin (Division of Natural Science, Sookmyung Women's University) ;
  • Kim, J.S. (Division of Natural Science, Sookmyung Women's University) ;
  • Hwang, Han-Na (Pohang Acceleration Laboratory) ;
  • Hwang, C.C. (Pohang Acceleration Laboratory) ;
  • Chang, Young J. (Department of Physics, Seoul National University) ;
  • Park, Soo-Hyon (Department of Physics, Seoul National University) ;
  • Min, H.G. (Department of Physics, Hong Ik University)
  • 양설운 (숙명여자대학교 자연과학부 물리학과) ;
  • 성시진 (숙명여자대학교 자연과학부 물리학과) ;
  • 김재성 (숙명여자대학교 자연과학부 물리학과) ;
  • 황한나 (포항 가속기 연구소) ;
  • 황찬국 (포항 가속기 연구소) ;
  • 장영준 (서울대학교 물리학부) ;
  • 박수현 (서울대학교 물리학부) ;
  • 민항기 (홍익대학교 물리학부)
  • Published : 2007.09.30
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Abstract

We have researched the chemical defects of NiO ultrathin films grown on Ag(001) by x-ray photoelectron spectroscopy. In particular, O 1s and Ni 2p spectra were analyzed consistently with control film thickness, $O_2\;and\;H_2O$ partial pressure and substrate temperature. As a result, we could identify each chemical defect. In addition, we suggest the optimum growth condition to minimize the defect density.

NiO 극초박막을 Ag(001) 단결정 위에 성장하는 과정에서 발생하는 화학 결함들을 X선 광전자 분광법을 이용하여 연구하였다. 특히 박막 두께, 산소 분압, 물 분압, 기판 온도 등을 잘 제어한 성장 환경에서 얻어진 O 1s, Ni 2p 스펙트라의 분석을 통하여 NiO 극초박막 성장 시 형성되는 화학 결함들의 정체를 일관성 있게 밝혀내었다. 이를 통하여 결함 밀도를 최소화 할 수 있는 최적의 성장 조건을 제안할 수 있게 되었다.

Keywords

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