Journal of the Optical Society of Korea

  • 제11권3호
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  • Pages.108-112
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  • 2007
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  • 1226-4776(pISSN)
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  • 2093-6885(eISSN)
한국광학회 (Optical Society of Korea)
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3D Nano Object Recognition based on Phase Measurement Technique

  • Kim, Dae-Suk (Division of Mechanical & Aero System Engineering, Chonbuk National University) ;
  • Baek, Byung-Joon (Division of Mechanical & Aero System Engineering, Chonbuk National University) ;
  • Kim, Young-Dong (Department of Physics, Kyung Hee University) ;
  • Javidi, Bahram (Department of Electrical & Computer Engineering, University of Connecticut)
  • 투고 : 2007.07.25
  • 발행 : 2007.09.25
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초록

Spectroscopic ellipsometry (SE) has become an important tool in scatterometry based nano-structure 3D profiling. In this paper, we propose a novel 3D nano object recognition method by use of phase sensitive scatterometry. We claims that only phase sensitive scatterometry can provide a reasonable 3D nano-object recognition capability since phase data gives much higher sensitive 3D information than amplitude data. To show the validity of this approach, first we generate various $0^{th}$ order SE spectrum data ($\psi$ and ${\Delta}$) which can be calculated through rigorous coupled-wave analysis (RCWA) algorithm and then we calculate correlation values between a reference spectrum and an object spectrum which is varied for several different object 3D shape.

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참고문헌

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