International Journal of Precision Engineering and Manufacturing

Korean Society for Precision Engineering (한국정밀공학회)
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Long Range and High Axial Load Capacity Nanopositioner Using Single Piezoelectric Actuator and Translating Supports

  • Juluri, Bala Krishna (School of Mechanical and Aerospace Engineering, Nanyang Technological University) ;
  • Lin, Wu (School of Mechanical and Aerospace Engineering, Nanyang Technological University) ;
  • Lim, Lennie E N (School of Mechanical and Aerospace Engineering, Nanyang Technological University)
  • Published : 2007.10.01
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Abstract

Existing long range piezoelectric motors with friction based transmission mechanisms are limited by the axial load capacity. To overcome this problem, a new linear piezoelectric motor using one piezoelectric actuator combined with a novel stepping mechanism is reported in this paper. To obtain both long range and fine accuracy, dual positioning control strategy consisting of coarse positioning and fine positioning is used. Coarse positioning is used for long travel range by accumulating motion steps obtained by piezoelectric actuator. This is followed by fine positioning where required accuracy is obtained by fine motion displacement of piezoelectric actuator. This prototype is able to provide resolution of 20 nanometers and withstand a maximum axial load of 300N. At maximum load condition, the positioner can move forward to a travel distance of 5mm at a maximum speed of 0.4 mm/sec. This design of nanopositioner can be used in applications for ultra precision positioning and grinding operations where high axial force capacity is required.

Keywords

References

  1. Fukada, S., 'Present and future technology of ultraprecision positioning,' Fuji Techno System, pp. 658-663, 2000
  2. May, W. G., 'Piezoelectric electromechanical translational apparatus,' US Patent No: 3902084, 1975
  3. Moon, C. W., Lee, S. H. and Chung, J. K., 'New inchworm type actuator with I/Q heterodyne interferometer feedback for a long stroke precision stage,' International Journal of Precision Engineering and Manufacturing, Vol. 6, No. 2, pp. 34-39, 2005
  4. Yamagata, Y. and Higuchi, T., 'A micropositioning device for precision automatic assembly using impact force of piezoelectric elements,' In Proc. IEEE conference of Robotics and Automation, Vol. 1, pp. 666-671, 1995
  5. Pohl, D. W., 'Dynamic piezoelectric translation devices,' Review of Scientific Instruments, Vol. 58, No. 1, pp. 54-57, 1987 https://doi.org/10.1063/1.1139566
  6. Kartaschew, I., Vishnevsky, V., Gultiaeva, L. and Lavrinenko, V., 'Piezoelectric motor,' Russian patent, CCCP No. 851560
  7. Uchino, K., 'Piezoelectric actuators and ultrasonic motors,' Kluwer Academic Publishers, 1996
  8. Isobe, H., Fushimi, M., Ootsuka, M. and Kyusojin, A., 'Noncontact transportation of flat panel substrate by combined ultrasonic acoustic viscous and aerostatic forces,' International Journal of Precision Engineering and Manufacturing, Vol. 8, No. 2, pp. 44-48, 2007
  9. Miyashita, M., Kanai, A. and Yoshioka, J., 'Design concept of ultraprecision and high stiffness feed system based on differentialforce operation, and the application,' In Proc. ASPE Annu. Meeting, pp. 126-129, 1992
  10. Sato, K., Murayama, Y., Imada, S. and Shimokohbe, A., 'An active lead screw mechanism-a lead screw with backlash control for ultra precision positioning,' In Proc. ASPE Annu. Meeting, pp. 112-115, 1992
  11. Elfizy, A. T., Bone, G. M. and Elbestawi, M. A., 'Design and control of a dual stage feed drive,' International Journal of Machine Tools and Manufacture, Vol. 45, No. 2, pp. 153-165, 2005 https://doi.org/10.1016/j.ijmachtools.2004.07.008
  12. Fukada, S. and Nishimura, K., 'Nanometric positioning over a one-millimeter stroke using a flexure guide and electromagnetic linear motor,' International Journal of Precision Engineering and Manufacturing, Vol. 8, No. 2, pp. 49-53, 2007
  13. Zhu, Z., 'Design of a linear piezomotor for positioning feed drives,' PhD thesis, Univ. of Connecticut, Hartford, CT, 1995
  14. Ngoi, K. A., Wu, L. and Lim, E. N., 'New linear piezoelectric motor with self-lock feature,' Japanese Journal of Applied Physics, Part 2: Letters, Vol. 39, No. 2B, pp. 1311-1313, 2000 https://doi.org/10.1143/JJAP.39.L1311
  15. Physik Instrumente(PI) 'Product Catalog: Nanopositioning,' Physik Instrumente (PI), pp. 1.24-1.25, 1998
  16. Renishaw Transducer System Ltd., 'Laser Measurement system- User Manual,' Renishaw Transducer System Ltd., U.K., 1989