Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)
- Volume 6 Issue 2 Serial No. 19
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- Pages.29-33
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- 2007
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- 1738-2270(pISSN)
The Impedance Matching Network for a ferromagnetic Inductively Coupled Plasma driven at 400 kHz.
400 kHz 페라이트 유도 결합 플라즈마를 위한 임피던스 매칭 네트워크
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Cho, Sung-Won
(Dept. of Electrical Engineering, Han Yang University)
;
- Bang, Jin-Young (Dept. of Electrical Engineering, Han Yang University) ;
- Lee, Young-Kwang (Dept. of Electrical Engineering, Han Yang University) ;
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Chung, Chin-Wook
(Dept. of Electrical Engineering, Han Yang University)
- Published : 2007.06.30
Abstract
Low frequency (400 kHz) Ferrite ICP has been proposed for large area processing. Because the coupling coefficient is close to 1, the transformer matching can be adapted to Ferrite ICP. The transformer matching system is simple. In this paper the new matching system by controlling the turns of transformer using relays is proposed for impedance matching. We developed a simple matching system and characterized it when the turns were changed. It was observed that the 2-channel relay is available for transformer matching.