반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)
- 제6권2호
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- Pages.15-18
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- 2007
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- 1738-2270(pISSN)
Enhanced Crystallization of Si at Low Temperature by $O_2$ Flow during Deposition
- Nam, Hyoung-Gin (Electronic Engineering Division, Sun Moon University) ;
- Koo, Kyung-Hwan (Electronic Engineering Division, Sun Moon University)
- 발행 : 2007.06.30
초록
Effects of