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In 도핑된 ZnO 박막의 투명 전극과 유기 발광 다이오드 특성

Transparent Anodic Properties of In-doped ZnO thin Films for Organic Light Emitting Devices

  • 박영란 (성균관대학교 물리학과 기능성나노신소재연구소) ;
  • 김용성 (성균관대학교 정보통신용 신기능성 소재 및 공정연구센터)
  • Park, Young-Ran (Department of Physics, Institute of Basic Science and Center for nanotubes and nanocomposites, Sungkyunkwan University) ;
  • Kim, Young-Sung (Advanced Material Process of Information Technology, Sungkyunkwan University)
  • 발행 : 2007.06.30

초록

Transparent In-doped zinc oxide (IZO) thin films are deposited with variation of pulsed DC power at Ar atmosphere on coming 7059 glass substrate by pulsed DC magnetron sputtering. A c-axis oriented IZO thin films were grown in perpendicular to the substrate. The optical transmittance spectra showed high transmittance of over 80% in the UV-visible region and exhibited the absorption edge of about 350 nm. Also, the IZO films exhibited the resistivity of ${\sim}10^{-3}{\Omega}\;cm$ and the mobility of ${\sim}6cm/V\;s$. Organic Light-emitting diodes (OLEDs) with IZO/N,N'-diphenyl-N, N'-bis(3-methylphenl)-1, 1'-biphenyl-4,4'-diamine (TPD)/tris (8-hydroxyquinoline) aluminum ($Alq_3$)/LiF/Al configuration were fabricated. LiF layer inserted is used as an interfacial layer to increase the electron injection. Under a current density of $100\;mA/cm^2$, the OLEDs show an excellent efficiency (9.4 V turn-on voltage) and a good brightness ($12000\;cd/m^2$) of the emission light from the devices. These results indicate that IZO films hold promise for anode electrodes in the OLEDs application.

키워드

참고문헌

  1. H. Kim, C. M. Gilmore, J. S. Horwitz, A. Pique, H. Murata, G. P. Kushto, R. Schlaf, Z. H. Kafafi, and D. B. Chrisey, 'Transparent Conducting Aluminum-doped Zinc Oxide thin Films for Organic Light-emitting Devices,' Appl. Phys. Lett., 76 259-61 (2000) https://doi.org/10.1063/1.125740
  2. H. Ko, C. S. Lee, W. P. Tai, S. J. Suh, and Y. S. kim, 'Effect of Pulsed Frequency on the Properties of ZnO: Al Thin Films Prepared by Pulsed DC Magnetron Sputtering(in korean),' J. kor. Ceram. Soc., 41 [6] 476-80 (2004) https://doi.org/10.4191/KCERS.2004.41.6.476
  3. X. Jiang, F. L. Wong, M. K. Fung, and S. T. Lee, 'Aluminum- doped Zinc Oxide Films as Transparent Conductive Electrode for Organic Light-emitting Devices,' Appl. Phys. Lett., 83 1875-77 (2003) https://doi.org/10.1063/1.1605805
  4. S.-M. Park, T. Ikegami, and K. Ebilhara, 'Investigation of Transparent Conductive Oxide Al-Doped ZnO Films Produced by Pulsed Laser Deposition,' Jpn. J. Appl. Phys., 44 8027-31 (2005) https://doi.org/10.1143/JJAP.44.8027
  5. S. Suzuki, T. Miyata, M. Ishii, and T. Minami, 'Transparent Conducting V-co-doped AZO thin Films Prepared by Magnetron Sputtering,' Thin Solid Films, 434 14-9 (2003) https://doi.org/10.1016/S0040-6090(03)00463-2
  6. R. F. Service, 'Will UV Lasers Beat the Blues?,' Sci., 276 895 (1997) https://doi.org/10.1126/science.276.5314.895
  7. K. J. Kim and Y. R. Park, 'Large and Abrupt Optical Band Gap Variation in In-doped ZnO,' Appl. Phys. Lett., 78 475- 77 (2001) https://doi.org/10.1063/1.1342042
  8. R. D. Shannon, 'Revised Effective Ionic Radii and Systematic Studies of Interatomic Distances in Halides and Chalcogenides,' Acta Crystallogr., Sect., A 32 751-67 (1976) https://doi.org/10.1107/S0567739476001551
  9. R. A. Smith, 'Semiconductors,' Cambridge University, Cambridge, p. 189, 1968
  10. E. Burstein, 'Anomalous Optical Absorption Limit in InSb,' Phys. Rev., 93 632-633 (1954) https://doi.org/10.1103/PhysRev.93.632