참고문헌
- S. Y. Chou et al., Appl. Phys. Lett., Vol.67, p.3114, 2005 https://doi.org/10.1063/1.114851
- C. G. Wilson et al., J. Vac. Sci. Technol. B, Vol.18, p.3572, 2000 https://doi.org/10.1116/1.1324618
- H. J. Kim et al., IMID '06 Digest technical papers, pp.1539, 2006